Photonic crystal slabs: fabrication with FIB-assisted Laser Interference Lithography

L. Vogelaar, W. Nijdam, Hendricus A.G.M. van Wolferen, E. Flück, Franciscus B. Segerink, L. Kuipers, N.F. van Hulst

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationVeldhoven
Publication statusPublished - 19 Dec 2000

Keywords

  • METIS-130861

Cite this

Vogelaar, L., Nijdam, W., van Wolferen, H. A. G. M., Flück, E., Segerink, F. B., Kuipers, L., & van Hulst, N. F. (2000, Dec 19). Photonic crystal slabs: fabrication with FIB-assisted Laser Interference Lithography. Veldhoven.