@inproceedings{e0b5a1fb47a04b9abb8688eb9a9ce7d9,
title = "Photoplastic SU-8 probes for Near-Field Optical Applications",
abstract = "We propose a new attempt to solve the manufacturing problem of SNOM probes by a novel wafer-scale microfabrication process for sharp pyramidal and bright photoplastic probes. The probes are fabricated of a transparent photoplastic material (SU-8) which allows simple batch fabrication based on spin coating and subsequent near-ultraviolet exposure and development steps. SU-8 consists of the epoxy-based EPON SU-8 resin photosensitized with a triaryl sulfonium salt. The main interest for MOEMS applications is that SU-8 is transparent. These combined advantages are used here to define a sharp, transparent and high aspect ratio probe dedicated for near-field optical applications",
keywords = "IR-25384, METIS-130185",
author = "J.P. Brugger and B.J. Kim and {van Hulst}, N.F.",
year = "2000",
month = aug,
day = "21",
doi = "10.1109/OMEMS.2000.879662",
language = "Undefined",
isbn = "0-7803-6257-8",
publisher = "IEEE",
pages = "135--136",
booktitle = "2000 IEEE/LEOS International Conference on Optical MEMS.",
address = "United States",
note = "null ; Conference date: 21-08-2000 Through 24-08-2000",
}