Phyiscs for stable capacitive MEMS-based devices

J. Sesé, L.J. Fernandez, J.M. Reitsema, G. van Essen, A. Wiegerink, Jakob Flokstra, J.T.M. Beek, Th.G.S.M. Rijks, P.G. Steeneken

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 16 Dec 2003

    Keywords

    • METIS-214813

    Cite this

    Sesé, J., Fernandez, L. J., Reitsema, J. M., van Essen, G., Wiegerink, A., Flokstra, J., ... Steeneken, P. G. (2003). Phyiscs for stable capacitive MEMS-based devices. -.