Phyiscs for stable capacitive MEMS-based devices

J. Sesé, L.J. Fernandez, J.M. Reitsema, G. van Essen, A. Wiegerink, Jakob Flokstra, J.T.M. Beek, Th.G.S.M. Rijks, P.G. Steeneken

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 16 Dec 2003
    EventFOM Wetenschappelijke Vergadering 2003 - Veldhoven, Nederland
    Duration: 16 Dec 200317 Dec 2003

    Conference

    ConferenceFOM Wetenschappelijke Vergadering 2003
    CityVeldhoven, Nederland
    Period16/12/0317/12/03

    Keywords

    • METIS-214813

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