Phyiscs for stable capacitive MEMS-based devices

J. Sesé; L.J. Fernandez; J.M. Reitsema; G. van Essen; A. Wiegerink; Jakob Flokstra; J.T.M. Beek; Th.G.S.M. Rijks; P.G. Steeneken

Phyiscs for stable capacitive MEMS-based devices

J. Sesé
, L.J. Fernandez
, J.M. Reitsema
, G. van Essen
, A. Wiegerink
, Jakob Flokstra
, J.T.M. Beek
, Th.G.S.M. Rijks
, P.G. Steeneken

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 16 Dec 2003
Event	FOM Wetenschappelijke Vergadering 2003 - Veldhoven, Nederland Duration: 16 Dec 2003 → 17 Dec 2003

Conference

Conference	FOM Wetenschappelijke Vergadering 2003
City	Veldhoven, Nederland
Period	16/12/03 → 17/12/03

Keywords

METIS-214813

Cite this

@conference{2e4749347c4045ad93c0bb5cd7ddbd04,

title = "Phyiscs for stable capacitive MEMS-based devices",

keywords = "METIS-214813",

author = "J. Ses{\'e} and L.J. Fernandez and J.M. Reitsema and \{van Essen\}, G. and A. Wiegerink and Jakob Flokstra and J.T.M. Beek and Th.G.S.M. Rijks and P.G. Steeneken",

year = "2003",

month = dec,

day = "16",

language = "Undefined",

pages = "--",

note = "FOM Wetenschappelijke Vergadering 2003 ; Conference date: 16-12-2003 Through 17-12-2003",

}

TY - CONF

T1 - Phyiscs for stable capacitive MEMS-based devices

AU - Sesé, J.

AU - Fernandez, L.J.

AU - Reitsema, J.M.

AU - van Essen, G.

AU - Wiegerink, A.

AU - Flokstra, Jakob

AU - Beek, J.T.M.

AU - Rijks, Th.G.S.M.

AU - Steeneken, P.G.

PY - 2003/12/16

Y1 - 2003/12/16

KW - METIS-214813

M3 - Poster

SP - -

T2 - FOM Wetenschappelijke Vergadering 2003

Y2 - 16 December 2003 through 17 December 2003

ER -