Physical chemistry of wetchemical anisotropic etching of silicon

Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

24 Downloads (Pure)

Original language	Undefined
Title of host publication	1995 ASME International mechanical engineering congress and exposition, gerefereed
Place of Publication	San Fransisco
Pages	-
Number of pages	2
Publication status	Published - 15 Nov 1995
Event	ASME International Mechanical Engineering Congress & Exposition, IMECE 1995 - San Francisco, United States Duration: 12 Nov 1995 → 17 Nov 1995

Other	ASME International Mechanical Engineering Congress & Exposition, IMECE 1995
Abbreviated title	IMECE
Country/Territory	United States
City	San Francisco
Period	12/11/95 → 17/11/95

Keywords

@inproceedings{4cc0ebae3084417e80e896be459ef8b6,

title = "Physical chemistry of wetchemical anisotropic etching of silicon",

keywords = "METIS-114131, IR-17236",

author = "Elwenspoek, {Michael Curt}",

year = "1995",

month = nov,

day = "15",

language = "Undefined",

pages = "--",

booktitle = "1995 ASME International mechanical engineering congress and exposition, gerefereed",

note = "ASME International Mechanical Engineering Congress & Exposition, IMECE 1995 ; Conference date: 12-11-1995 Through 17-11-1995",

}

TY - GEN

T1 - Physical chemistry of wetchemical anisotropic etching of silicon

AU - Elwenspoek, Michael Curt

PY - 1995/11/15

Y1 - 1995/11/15

KW - METIS-114131

KW - IR-17236

M3 - Conference contribution

SP - -

BT - 1995 ASME International mechanical engineering congress and exposition, gerefereed

CY - San Fransisco

T2 - ASME International Mechanical Engineering Congress & Exposition, IMECE 1995

Y2 - 12 November 1995 through 17 November 1995

ER -