Physical chemistry of wetchemical anisotropic etching of silicon

Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Original languageUndefined
    Title of host publication1995 ASME International mechanical engineering congress and exposition, gerefereed
    Place of PublicationSan Fransisco
    Pages-
    Number of pages2
    Publication statusPublished - 15 Nov 1995
    EventASME International Mechanical Engineering Congress & Exposition, IMECE 1995 - San Francisco, United States
    Duration: 12 Nov 199517 Nov 1995

    Other

    OtherASME International Mechanical Engineering Congress & Exposition, IMECE 1995
    Abbreviated titleIMECE
    CountryUnited States
    CitySan Francisco
    Period12/11/9517/11/95

    Keywords

    • METIS-114131
    • IR-17236

    Cite this

    Elwenspoek, M. C. (1995). Physical chemistry of wetchemical anisotropic etching of silicon. In 1995 ASME International mechanical engineering congress and exposition, gerefereed (pp. -). San Fransisco.