Physical chemistry of wetchemical anisotropic etching of silicon

Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    10 Downloads (Pure)
    Original languageUndefined
    Title of host publication1995 ASME International mechanical engineering congress and exposition, gerefereed
    Place of PublicationSan Fransisco
    Pages-
    Number of pages2
    Publication statusPublished - 15 Nov 1995
    EventASME International Mechanical Engineering Congress & Exposition, IMECE 1995 - San Francisco, United States
    Duration: 12 Nov 1995 → 17 Nov 1995

    Other

    OtherASME International Mechanical Engineering Congress & Exposition, IMECE 1995
    Abbreviated titleIMECE
    CountryUnited States
    CitySan Francisco
    Period12/11/95 → 17/11/95

    Keywords

    • METIS-114131
    • IR-17236

    Cite this

    Elwenspoek, M. C. (1995). Physical chemistry of wetchemical anisotropic etching of silicon. In 1995 ASME International mechanical engineering congress and exposition, gerefereed (pp. -). San Fransisco.
    Elwenspoek, Michael Curt. / Physical chemistry of wetchemical anisotropic etching of silicon. 1995 ASME International mechanical engineering congress and exposition, gerefereed. San Fransisco, 1995. pp. -
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    author = "Elwenspoek, {Michael Curt}",
    year = "1995",
    month = "11",
    day = "15",
    language = "Undefined",
    pages = "--",
    booktitle = "1995 ASME International mechanical engineering congress and exposition, gerefereed",

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    Elwenspoek, MC 1995, Physical chemistry of wetchemical anisotropic etching of silicon. in 1995 ASME International mechanical engineering congress and exposition, gerefereed. San Fransisco, pp. -, ASME International Mechanical Engineering Congress & Exposition, IMECE 1995, San Francisco, United States, 12/11/95.

    Physical chemistry of wetchemical anisotropic etching of silicon. / Elwenspoek, Michael Curt.

    1995 ASME International mechanical engineering congress and exposition, gerefereed. San Fransisco, 1995. p. -.

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    TY - GEN

    T1 - Physical chemistry of wetchemical anisotropic etching of silicon

    AU - Elwenspoek, Michael Curt

    PY - 1995/11/15

    Y1 - 1995/11/15

    KW - METIS-114131

    KW - IR-17236

    M3 - Conference contribution

    SP - -

    BT - 1995 ASME International mechanical engineering congress and exposition, gerefereed

    CY - San Fransisco

    ER -

    Elwenspoek MC. Physical chemistry of wetchemical anisotropic etching of silicon. In 1995 ASME International mechanical engineering congress and exposition, gerefereed. San Fransisco. 1995. p. -

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