Physical modelling of the µWalker, a MEMS linear stepper actuator

M. Patrascu, Stefano Stramigioli

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

This paper is about modelling and simulation of the µWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.
Original languageUndefined
Title of host publicationEighth International IFAC Symposium on Robot Control, 2006
PublisherIFAC
PagesPaper 124
Number of pages6
ISBN (Print)978-3-902661-16-6
Publication statusPublished - 2006
Event8th International IFAC Symposium on Robot Control, SYROCO 2006 - Bologna, Italy
Duration: 6 Sep 20068 Sep 2006
Conference number: 8

Publication series

Name
Number11

Conference

Conference8th International IFAC Symposium on Robot Control, SYROCO 2006
Abbreviated titleSYROCO
CountryItaly
CityBologna
Period6/09/068/09/06

Keywords

  • METIS-248251
  • EWI-12676
  • CE-Advanced Robotics

Cite this

Patrascu, M., & Stramigioli, S. (2006). Physical modelling of the µWalker, a MEMS linear stepper actuator. In Eighth International IFAC Symposium on Robot Control, 2006 (pp. Paper 124). IFAC.
Patrascu, M. ; Stramigioli, Stefano. / Physical modelling of the µWalker, a MEMS linear stepper actuator. Eighth International IFAC Symposium on Robot Control, 2006. IFAC, 2006. pp. Paper 124
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Patrascu, M & Stramigioli, S 2006, Physical modelling of the µWalker, a MEMS linear stepper actuator. in Eighth International IFAC Symposium on Robot Control, 2006. IFAC, pp. Paper 124, 8th International IFAC Symposium on Robot Control, SYROCO 2006, Bologna, Italy, 6/09/06.

Physical modelling of the µWalker, a MEMS linear stepper actuator. / Patrascu, M.; Stramigioli, Stefano.

Eighth International IFAC Symposium on Robot Control, 2006. IFAC, 2006. p. Paper 124.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AB - This paper is about modelling and simulation of the µWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.

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Patrascu M, Stramigioli S. Physical modelling of the µWalker, a MEMS linear stepper actuator. In Eighth International IFAC Symposium on Robot Control, 2006. IFAC. 2006. p. Paper 124