Physical modelling of the µWalker, a MEMS linear stepper actuator

M. Patrascu, Stefano Stramigioli

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    This paper is about modelling and simulation of the µWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.
    Original languageUndefined
    Title of host publicationEighth International IFAC Symposium on Robot Control, 2006
    PublisherIFAC
    PagesPaper 124
    Number of pages6
    ISBN (Print)978-3-902661-16-6
    Publication statusPublished - 2006
    Event8th International IFAC Symposium on Robot Control, SYROCO 2006 - Bologna, Italy
    Duration: 6 Sep 20068 Sep 2006
    Conference number: 8

    Publication series

    Name
    Number11

    Conference

    Conference8th International IFAC Symposium on Robot Control, SYROCO 2006
    Abbreviated titleSYROCO
    CountryItaly
    CityBologna
    Period6/09/068/09/06

    Keywords

    • METIS-248251
    • EWI-12676
    • CE-Advanced Robotics

    Cite this

    Patrascu, M., & Stramigioli, S. (2006). Physical modelling of the µWalker, a MEMS linear stepper actuator. In Eighth International IFAC Symposium on Robot Control, 2006 (pp. Paper 124). IFAC.