Physical modelling of the µWalker, a MEMS linear stepper actuator

M. Patrascu; Stefano Stramigioli

Physical modelling of the µWalker, a MEMS linear stepper actuator

M. Patrascu
, Stefano Stramigioli

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

This paper is about modelling and simulation of the µWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.

Original language	Undefined
Title of host publication	Eighth International IFAC Symposium on Robot Control, 2006
Publisher	IFAC
Pages	Paper 124
Number of pages	6
ISBN (Print)	978-3-902661-16-6
Publication status	Published - 2006
Event	8th International IFAC Symposium on Robot Control, SYROCO 2006 - Bologna, Italy Duration: 6 Sept 2006 → 8 Sept 2006 Conference number: 8

Publication series

Name
Number	11

Conference

Conference	8th International IFAC Symposium on Robot Control, SYROCO 2006
Abbreviated title	SYROCO
Country/Territory	Italy
City	Bologna
Period	6/09/06 → 8/09/06

Keywords

METIS-248251
EWI-12676
CE-Advanced Robotics

Access to Document

http://www.ifac-papersonline.net/cgi-bin/links/page.cgi?g=Detailed/31188.html;d=1

Cite this

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title = "Physical modelling of the µWalker, a MEMS linear stepper actuator",

abstract = "This paper is about modelling and simulation of the µWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.",

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AB - This paper is about modelling and simulation of the µWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.

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KW - EWI-12676

KW - CE-Advanced Robotics

M3 - Conference contribution

SN - 978-3-902661-16-6

SP - Paper 124

BT - Eighth International IFAC Symposium on Robot Control, 2006

PB - IFAC

T2 - 8th International IFAC Symposium on Robot Control, SYROCO 2006

Y2 - 6 September 2006 through 8 September 2006

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