Physical modelling of the μWalker, a MEMS linear stepper actuator

Mihai Patrascu; Stefano Stramigioli

doi:10.3182/20060906-3-IT-2910.00124

Physical modelling of the μWalker, a MEMS linear stepper actuator

Mihai Patrascu^*, Stefano Stramigioli

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › Academic › peer-review

1 Citation (Scopus)

5 Downloads (Pure)

Abstract

This paper is about modelling and simulation of the μWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.

Original language	English
Pages (from-to)	743-748
Journal	IFAC proceedings volumes
Volume	39
Issue number	15
DOIs	https://doi.org/10.3182/20060906-3-IT-2910.00124
Publication status	Published - 1 Dec 2006
Event	8th International IFAC Symposium on Robot Control, SYROCO 2006 - Bologna, Italy Duration: 6 Sept 2006 → 8 Sept 2006 Conference number: 8

Keywords

Electro-mechanical
MEMS
Physical modeling
Pull-in
Simulation

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10.3182/20060906-3-IT-2910.00124

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N2 - This paper is about modelling and simulation of the μWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.

AB - This paper is about modelling and simulation of the μWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.

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KW - MEMS

KW - Physical modeling

KW - Pull-in

KW - Simulation

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DO - 10.3182/20060906-3-IT-2910.00124

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Y2 - 6 September 2006 through 8 September 2006

ER -

Physical modelling of the μWalker, a MEMS linear stepper actuator

Abstract

Keywords

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