Physical modelling of the μWalker, a MEMS linear stepper actuator

Mihai Patrascu*, Stefano Stramigioli

*Corresponding author for this work

    Research output: Contribution to journalConference articleAcademicpeer-review

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    Abstract

    This paper is about modelling and simulation of the μWalker, an electrostatic micro actuator based on stepper motion. Design optimization can be done fast and at low-cost, provided a competent model is available. The main accent lies on the modelling part of the electro-elastic plate, and on the stick-slip and beam stiffening effects. Simulations are compared to measurement results.

    Original languageEnglish
    Pages (from-to)743-748
    JournalIFAC proceedings volumes
    Volume39
    Issue number15
    DOIs
    Publication statusPublished - 1 Dec 2006
    Event8th International IFAC Symposium on Robot Control, SYROCO 2006 - Bologna, Italy
    Duration: 6 Sep 20068 Sep 2006
    Conference number: 8

    Keywords

    • Electro-mechanical
    • MEMS
    • Physical modeling
    • Pull-in
    • Simulation

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