Piezo-electric MEMS by Pulsed Laser Deposition

Ruud Johannes Antonius Steenwelle, Duc Minh Nguyen, Jan M. Dekkers, A.C. de Waal, X. Wan, David H.A. Blank, Augustinus J.H.M. Rijnders

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 21 Sep 2009
EventMESA+ Day 2009 - De Grolsch Veste, Enschede, Netherlands
Duration: 21 Sep 200921 Sep 2009

Conference

ConferenceMESA+ Day 2009
CountryNetherlands
CityEnschede
Period21/09/0921/09/09
Other(MESA+ Meeting/Dag)

Keywords

  • METIS-260593

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