Piezoelectric Based Adaptive Optics for Extreme Ultraviolet Wavelenghts

Research output: Contribution to conferenceAbstract

Original languageEnglish
Publication statusPublished - 2016
EventSPIE Advanced Lithography 2015 - Marriott and Convention Center, San Jose, United States
Duration: 22 Feb 201526 Feb 2015

Conference

ConferenceSPIE Advanced Lithography 2015
CountryUnited States
CitySan Jose
Period22/02/1526/02/15

Keywords

  • IR-98978

Cite this

Bayraktar, M., Chopra, A., Rijnders, A. J. H. M., Boller, K. J., & Bijkerk, F. (2016). Piezoelectric Based Adaptive Optics for Extreme Ultraviolet Wavelenghts. Abstract from SPIE Advanced Lithography 2015, San Jose, United States.