Piezoelectric Based Adaptive Optics for Extreme Ultraviolet Wavelenghts

Research output: Contribution to conference › Abstract › Academic

Original language	English
Publication status	Published - 2016
Event	SPIE Advanced Lithography 2015 - Marriott and Convention Center, San Jose, United States Duration: 22 Feb 2015 → 26 Feb 2015

Keywords

@conference{9c7fef809a324f0da1041d0fcdbecf0a,

title = "Piezoelectric Based Adaptive Optics for Extreme Ultraviolet Wavelenghts",

keywords = "IR-98978",

author = "Muharrem Bayraktar and A. Chopra and Rijnders, {Augustinus J.H.M.} and Boller, {Klaus J.} and Frederik Bijkerk",

year = "2016",

language = "English",

note = "SPIE Advanced Lithography 2015 ; Conference date: 22-02-2015 Through 26-02-2015",

}