This paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly is flying above the rotating disk with a typical spacing of 100nm. Possible mechanical interactions between the slider and the disk are expected to produce impact forces in the order of 0.1N with a frequency range from 100kHz to 100MHz .
|Number of pages||6|
|Publication status||Published - 29 Jan 1995|
|Event||IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands|
Duration: 29 Jan 1995 → 2 Feb 1995
|Workshop||IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995|
|Period||29/01/95 → 2/02/95|