Piezoelectric impact force sensor array for tribological research on rigid disk storage media

G.J. Burger; T.S.J. Lammerink; J.H.J. Fluitman; S. Imai; M. Tokuyama; S. Hirose

doi:10.1109/MEMSYS.1995.472607

Piezoelectric impact force sensor array for tribological research on rigid disk storage media

G.J. Burger, T.S.J. Lammerink, J.H.J. Fluitman, S. Imai, M. Tokuyama, S. Hirose

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Abstract

This paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly is flying above the rotating disk with a typical spacing of 100nm. Possible mechanical interactions between the slider and the disk are expected to produce impact forces in the order of 0.1N with a frequency range from 100kHz to 100MHz [1].

Original language	English
Pages	294-299
Number of pages	6
DOIs	https://doi.org/10.1109/MEMSYS.1995.472607
Publication status	Published - 29 Jan 1995
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands Duration: 29 Jan 1995 → 2 Feb 1995

Workshop

Workshop	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
Abbreviated title	MEMS
Country/Territory	Netherlands
City	Amsterdam
Period	29/01/95 → 2/02/95

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10.1109/MEMSYS.1995.472607

Burger1995piezoelectricFinal published version, 502 KB

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title = "Piezoelectric impact force sensor array for tribological research on rigid disk storage media",

abstract = "This paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly is flying above the rotating disk with a typical spacing of 100nm. Possible mechanical interactions between the slider and the disk are expected to produce impact forces in the order of 0.1N with a frequency range from 100kHz to 100MHz [1].",

author = "G.J. Burger and T.S.J. Lammerink and J.H.J. Fluitman and S. Imai and M. Tokuyama and S. Hirose",

year = "1995",

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doi = "10.1109/MEMSYS.1995.472607",

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AU - Burger, G.J.

AU - Lammerink, T.S.J.

AU - Fluitman, J.H.J.

AU - Imai, S.

AU - Tokuyama, M.

AU - Hirose, S.

PY - 1995/1/29

Y1 - 1995/1/29

N2 - This paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly is flying above the rotating disk with a typical spacing of 100nm. Possible mechanical interactions between the slider and the disk are expected to produce impact forces in the order of 0.1N with a frequency range from 100kHz to 100MHz [1].

AB - This paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly is flying above the rotating disk with a typical spacing of 100nm. Possible mechanical interactions between the slider and the disk are expected to produce impact forces in the order of 0.1N with a frequency range from 100kHz to 100MHz [1].

U2 - 10.1109/MEMSYS.1995.472607

DO - 10.1109/MEMSYS.1995.472607

M3 - Paper

SP - 294

EP - 299

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995

Y2 - 29 January 1995 through 2 February 1995

ER -

Piezoelectric impact force sensor array for tribological research on rigid disk storage media

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