Piezoelectric impact force sensor array for tribological research on rigid disk storage media

G.J. Burger, T.S.J. Lammerink, J.H.J. Fluitman, S. Imai, M. Tokuyama, S. Hirose

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    Abstract

    This paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly is flying above the rotating disk with a typical spacing of 100nm. Possible mechanical interactions between the slider and the disk are expected to produce impact forces in the order of 0.1N with a frequency range from 100kHz to 100MHz [1].
    Original languageEnglish
    Pages294-299
    Number of pages6
    DOIs
    Publication statusPublished - 29 Jan 1995
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
    Duration: 29 Jan 19952 Feb 1995

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Abbreviated titleMEMS
    CountryNetherlands
    CityAmsterdam
    Period29/01/952/02/95

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  • Cite this

    Burger, G. J., Lammerink, T. S. J., Fluitman, J. H. J., Imai, S., Tokuyama, M., & Hirose, S. (1995). Piezoelectric impact force sensor array for tribological research on rigid disk storage media. 294-299. Paper presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995, Amsterdam, Netherlands. https://doi.org/10.1109/MEMSYS.1995.472607