Piezoelectric materials for MEMS applications

Duc Minh Nguyen, K. Karakaya, P.M. te Riele, David H.A. Blank, Augustinus J.H.M. Rijnders

Research output: Contribution to conference › Paper

Original language	Undefined
Pages	315-318
Publication status	Published - 6 Jan 2008
Event	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Resort Horizon Sanya, Sanya, China Duration: 6 Jan 2008 → 9 Jan 2008 Conference number: 3

Conference	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Abbreviated title	NEMS
Country	China
City	Sanya
Period	6/01/08 → 9/01/08

Keywords

@conference{d47aa84f5a134e75a7f832374fe7fc09,

title = "Piezoelectric materials for MEMS applications",

keywords = "METIS-250707",

author = "Nguyen, {Duc Minh} and K. Karakaya and {te Riele}, P.M. and Blank, {David H.A.} and Rijnders, {Augustinus J.H.M.}",

year = "2008",

month = jan,

day = "6",

language = "Undefined",

pages = "315--318",

note = "null ; Conference date: 06-01-2008 Through 09-01-2008",

}