Piezoelectric materials for MEMS applications

Duc Minh Nguyen; K. Karakaya; P.M. te Riele; David H.A. Blank; Augustinus J.H.M. Rijnders

Piezoelectric materials for MEMS applications

Duc Minh Nguyen, K. Karakaya, P.M. te Riele, David H.A. Blank, Augustinus J.H.M. Rijnders

Inorganic Materials Science

Research output: Contribution to conference › Paper

Original language	Undefined
Pages	315-318
Publication status	Published - 6 Jan 2008
Event	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Resort Horizon Sanya, Sanya, China Duration: 6 Jan 2008 → 9 Jan 2008 Conference number: 3

Conference

Conference	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Abbreviated title	NEMS
Country/Territory	China
City	Sanya
Period	6/01/08 → 9/01/08

Keywords

METIS-250707

Cite this

@conference{d47aa84f5a134e75a7f832374fe7fc09,

title = "Piezoelectric materials for MEMS applications",

keywords = "METIS-250707",

author = "Nguyen, {Duc Minh} and K. Karakaya and {te Riele}, P.M. and Blank, {David H.A.} and Rijnders, {Augustinus J.H.M.}",

year = "2008",

month = jan,

day = "6",

language = "Undefined",

pages = "315--318",

note = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 ; Conference date: 06-01-2008 Through 09-01-2008",

}

TY - CONF

T1 - Piezoelectric materials for MEMS applications

AU - Nguyen, Duc Minh

AU - Karakaya, K.

AU - te Riele, P.M.

AU - Blank, David H.A.

AU - Rijnders, Augustinus J.H.M.

N1 - Conference code: 3

PY - 2008/1/6

Y1 - 2008/1/6

KW - METIS-250707

M3 - Paper

SP - 315

EP - 318

T2 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008

Y2 - 6 January 2008 through 9 January 2008

ER -