Piezoelectric materials for MEMS applications

Duc Minh Nguyen, K. Karakaya, P.M. te Riele, David H.A. Blank, Augustinus J.H.M. Rijnders

Research output: Contribution to conferencePaper

3 Citations (Scopus)
Original languageUndefined
Pages315-318
Publication statusPublished - 6 Jan 2008
Event3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Resort Horizon Sanya, Sanya, China
Duration: 6 Jan 20089 Jan 2008
Conference number: 3

Conference

Conference3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Abbreviated titleNEMS
CountryChina
CitySanya
Period6/01/089/01/08

Keywords

  • METIS-250707

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