Piezoelectric materials for MEMS applications

Duc Minh Nguyen, K. Karakaya, P.M. te Riele, David H.A. Blank, Augustinus J.H.M. Rijnders

Research output: Contribution to conference › Paper › Academic

3 Citations (Scopus)
Original languageUndefined
Pages315-318
Publication statusPublished - 6 Jan 2008
Event3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Resort Horizon Sanya, Sanya, China
Duration: 6 Jan 2008 → 9 Jan 2008
Conference number: 3

Conference

Conference3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Abbreviated titleNEMS
CountryChina
CitySanya
Period6/01/08 → 9/01/08

Keywords

  • METIS-250707

Cite this

Nguyen, D. M., Karakaya, K., te Riele, P. M., Blank, D. H. A., & Rijnders, A. J. H. M. (2008). Piezoelectric materials for MEMS applications. 315-318. Paper presented at 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China.
Nguyen, Duc Minh ; Karakaya, K. ; te Riele, P.M. ; Blank, David H.A. ; Rijnders, Augustinus J.H.M. / Piezoelectric materials for MEMS applications. Paper presented at 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China.
@conference{d47aa84f5a134e75a7f832374fe7fc09,
title = "Piezoelectric materials for MEMS applications",
keywords = "METIS-250707",
author = "Nguyen, {Duc Minh} and K. Karakaya and {te Riele}, P.M. and Blank, {David H.A.} and Rijnders, {Augustinus J.H.M.}",
year = "2008",
month = "1",
day = "6",
language = "Undefined",
pages = "315--318",
note = "null ; Conference date: 06-01-2008 Through 09-01-2008",

}

Nguyen, DM, Karakaya, K, te Riele, PM, Blank, DHA & Rijnders, AJHM 2008, 'Piezoelectric materials for MEMS applications' Paper presented at 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China, 6/01/08 - 9/01/08, pp. 315-318.

Piezoelectric materials for MEMS applications. / Nguyen, Duc Minh; Karakaya, K.; te Riele, P.M.; Blank, David H.A.; Rijnders, Augustinus J.H.M.

2008. 315-318 Paper presented at 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China.

Research output: Contribution to conference › Paper › Academic

TY - CONF

T1 - Piezoelectric materials for MEMS applications

AU - Nguyen, Duc Minh

AU - Karakaya, K.

AU - te Riele, P.M.

AU - Blank, David H.A.

AU - Rijnders, Augustinus J.H.M.

PY - 2008/1/6

Y1 - 2008/1/6

KW - METIS-250707

M3 - Paper

SP - 315

EP - 318

ER -

Nguyen DM, Karakaya K, te Riele PM, Blank DHA, Rijnders AJHM. Piezoelectric materials for MEMS applications. 2008. Paper presented at 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China.