Piezoelectric MEMS - Adding new functionalities to Silicon Technology

Ruud Johannes Antonius Steenwelle; X. Wan; Jan M. Dekkers; A.C. de Waal; Duc Minh Nguyen; David H.A. Blank; Augustinus J.H.M. Rijnders

Piezoelectric MEMS - Adding new functionalities to Silicon Technology

Ruud Johannes Antonius Steenwelle, X. Wan, Jan M. Dekkers, A.C. de Waal, Duc Minh Nguyen, David H.A. Blank, Augustinus J.H.M. Rijnders

Inorganic Materials Science

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 14 Sept 2010
Event	MESA+ Meeting 2010 - Enschede, Netherlands Duration: 14 Sept 2010 → 14 Sept 2010

Conference

Conference	MESA+ Meeting 2010
Country/Territory	Netherlands
City	Enschede
Period	14/09/10 → 14/09/10
Other	(MESA+ Day/Dag)

Keywords

METIS-269852

Cite this

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title = "Piezoelectric MEMS - Adding new functionalities to Silicon Technology",

keywords = "METIS-269852",

author = "Steenwelle, {Ruud Johannes Antonius} and X. Wan and Dekkers, {Jan M.} and {de Waal}, A.C. and Nguyen, {Duc Minh} and Blank, {David H.A.} and Rijnders, {Augustinus J.H.M.}",

year = "2010",

month = sep,

day = "14",

language = "Undefined",

pages = "--",

note = "MESA+ Meeting 2010 ; Conference date: 14-09-2010 Through 14-09-2010",

}

TY - CONF

T1 - Piezoelectric MEMS - Adding new functionalities to Silicon Technology

AU - Steenwelle, Ruud Johannes Antonius

AU - Wan, X.

AU - Dekkers, Jan M.

AU - de Waal, A.C.

AU - Nguyen, Duc Minh

AU - Blank, David H.A.

AU - Rijnders, Augustinus J.H.M.

PY - 2010/9/14

Y1 - 2010/9/14

KW - METIS-269852

M3 - Poster

SP - -

T2 - MESA+ Meeting 2010

Y2 - 14 September 2010 through 14 September 2010

ER -