Piezoelectric MEMS - Adding new functionalities to Silicon Technology

Ruud Johannes Antonius Steenwelle, X. Wan, Jan M. Dekkers, A.C. de Waal, Duc Minh Nguyen, David H.A. Blank, Augustinus J.H.M. Rijnders

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 14 Sep 2010
EventMESA+ Meeting 2010 - Enschede, Netherlands
Duration: 14 Sep 201014 Sep 2010

Conference

ConferenceMESA+ Meeting 2010
CountryNetherlands
CityEnschede
Period14/09/1014/09/10
Other(MESA+ Day/Dag)

Keywords

  • METIS-269852

Cite this

Steenwelle, R. J. A., Wan, X., Dekkers, J. M., de Waal, A. C., Nguyen, D. M., Blank, D. H. A., & Rijnders, A. J. H. M. (2010). Piezoelectric MEMS - Adding new functionalities to Silicon Technology. -. Poster session presented at MESA+ Meeting 2010, Enschede, Netherlands.