Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure

Imran Fazal; M.C. Elwenspoek

doi:10.1115/DETC2007-35878

Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure

Imran Fazal, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

4 Downloads (Pure)

Abstract

We present a normally open piezoelectric actuated micro valve, based on the novel concept of micro and fine machining technology. This new design allows a wide controllable range for high flow at a high pressure difference between inlet and outlet. This promising combination of micro and fine machining (piezoelectric actuator) provides the opportunity to take the steps that control the flow precisely. The use of piezoelectric actuator provides the opportunity of continuous control of gas flow at any stage during entire valve operation. In our previous design, larger steps caused by the friction between screw threads, limits the controllability [1]. Additionally the power consumption is low as piezoactuator needs power only to take steps to control the flow of gas.

Original language	English
Title of host publication	ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007
Subtitle of host publication	Proceedings of the 1st International Conference on Micro- and Nanosystems
Place of Publication	New York, NY
Publisher	American Society of Mechanical Engineers
Pages	841-844
Number of pages	4
ISBN (Electronic)	0-7918-3806-4
ISBN (Print)	0-7918-4804-3
DOIs	https://doi.org/10.1115/DETC2007-35878
Publication status	Published - 2008
Event	ASME 2007 Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007 - Las Vegas, United States Duration: 4 Sept 2007 → 7 Sept 2007

Conference

Conference	ASME 2007 Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007
Abbreviated title	DETC
Country/Territory	United States
City	Las Vegas
Period	4/09/07 → 7/09/07

Keywords

METIS-254926
EWI-14251
IR-65149

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1115/DETC2007-35878

Cite this

Fazal, I., & Elwenspoek, M. C. (2008). Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure. In ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007: Proceedings of the 1st International Conference on Micro- and Nanosystems (pp. 841-844). American Society of Mechanical Engineers. https://doi.org/10.1115/DETC2007-35878

Fazal, Imran ; Elwenspoek, M.C. / Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure. ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007: Proceedings of the 1st International Conference on Micro- and Nanosystems. New York, NY : American Society of Mechanical Engineers, 2008. pp. 841-844

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title = "Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure",

abstract = "We present a normally open piezoelectric actuated micro valve, based on the novel concept of micro and fine machining technology. This new design allows a wide controllable range for high flow at a high pressure difference between inlet and outlet. This promising combination of micro and fine machining (piezoelectric actuator) provides the opportunity to take the steps that control the flow precisely. The use of piezoelectric actuator provides the opportunity of continuous control of gas flow at any stage during entire valve operation. In our previous design, larger steps caused by the friction between screw threads, limits the controllability [1]. Additionally the power consumption is low as piezoactuator needs power only to take steps to control the flow of gas.",

keywords = "METIS-254926, EWI-14251, IR-65149",

author = "Imran Fazal and M.C. Elwenspoek",

year = "2008",

doi = "10.1115/DETC2007-35878",

language = "English",

isbn = "0-7918-4804-3",

pages = "841--844",

booktitle = "ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007",

publisher = "American Society of Mechanical Engineers",

address = "United States",

note = "ASME 2007 Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007, DETC ; Conference date: 04-09-2007 Through 07-09-2007",

}

Fazal, I & Elwenspoek, MC 2008, Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure. in ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007: Proceedings of the 1st International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers, New York, NY, pp. 841-844, ASME 2007 Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007, Las Vegas, Nevada, United States, 4/09/07. https://doi.org/10.1115/DETC2007-35878

Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure. / Fazal, Imran; Elwenspoek, M.C.
ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007: Proceedings of the 1st International Conference on Micro- and Nanosystems. New York, NY: American Society of Mechanical Engineers, 2008. p. 841-844.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure

AU - Fazal, Imran

AU - Elwenspoek, M.C.

PY - 2008

Y1 - 2008

N2 - We present a normally open piezoelectric actuated micro valve, based on the novel concept of micro and fine machining technology. This new design allows a wide controllable range for high flow at a high pressure difference between inlet and outlet. This promising combination of micro and fine machining (piezoelectric actuator) provides the opportunity to take the steps that control the flow precisely. The use of piezoelectric actuator provides the opportunity of continuous control of gas flow at any stage during entire valve operation. In our previous design, larger steps caused by the friction between screw threads, limits the controllability [1]. Additionally the power consumption is low as piezoactuator needs power only to take steps to control the flow of gas.

AB - We present a normally open piezoelectric actuated micro valve, based on the novel concept of micro and fine machining technology. This new design allows a wide controllable range for high flow at a high pressure difference between inlet and outlet. This promising combination of micro and fine machining (piezoelectric actuator) provides the opportunity to take the steps that control the flow precisely. The use of piezoelectric actuator provides the opportunity of continuous control of gas flow at any stage during entire valve operation. In our previous design, larger steps caused by the friction between screw threads, limits the controllability [1]. Additionally the power consumption is low as piezoactuator needs power only to take steps to control the flow of gas.

KW - METIS-254926

KW - EWI-14251

KW - IR-65149

U2 - 10.1115/DETC2007-35878

DO - 10.1115/DETC2007-35878

M3 - Conference contribution

SN - 0-7918-4804-3

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EP - 844

BT - ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007

PB - American Society of Mechanical Engineers

CY - New York, NY

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Y2 - 4 September 2007 through 7 September 2007

ER -

Fazal I, Elwenspoek MC. Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure. In ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007: Proceedings of the 1st International Conference on Micro- and Nanosystems. New York, NY: American Society of Mechanical Engineers. 2008. p. 841-844 doi: 10.1115/DETC2007-35878

Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure

Abstract

Conference

Keywords

UN SDGs

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