Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure

Imran Fazal, M.C. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)

    Abstract

    We present a normally open piezoelectric actuated micro valve, based on the novel concept of micro and fine machining technology. This new design allows a wide controllable range for high flow at a high pressure difference between inlet and outlet. This promising combination of micro and fine machining (piezoelectric actuator) provides the opportunity to take the steps that control the flow precisely. The use of piezoelectric actuator provides the opportunity of continuous control of gas flow at any stage during entire valve operation. In our previous design, larger steps caused by the friction between screw threads, limits the controllability [1]. Additionally the power consumption is low as piezoactuator needs power only to take steps to control the flow of gas.
    Original languageEnglish
    Title of host publicationASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007
    Subtitle of host publicationProceedings of the 1st International Conference on Micro- and Nanosystems
    Place of PublicationNew York, NY
    PublisherAmerican Society of Mechanical Engineers (ASME)
    Pages841-844
    Number of pages4
    ISBN (Electronic)0-7918-3806-4
    ISBN (Print)0-7918-4804-3
    DOIs
    Publication statusPublished - 2008
    EventASME 2007 Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007 - Las Vegas, United States
    Duration: 4 Sep 20077 Sep 2007

    Conference

    ConferenceASME 2007 Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007
    Abbreviated titleDETC
    CountryUnited States
    CityLas Vegas
    Period4/09/077/09/07

    Keywords

    • METIS-254926
    • EWI-14251
    • IR-65149

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  • Cite this

    Fazal, I., & Elwenspoek, M. C. (2008). Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure. In ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2007: Proceedings of the 1st International Conference on Micro- and Nanosystems (pp. 841-844). New York, NY: American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2007-35878