Piezoresistive friction force sensor for tribological research

Johannes Burger, Erwin Berenschot, Gert-Jan Burger, Miko Elwenspoek, Harm Visscher

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Abstract

A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a (100) silicon water.
Original languageEnglish
Pages (from-to)138-140
Number of pages3
JournalJournal of micromechanics and microengineering
Volume1998
Issue number8
DOIs
Publication statusPublished - Jun 1998

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