Piezoresistive friction force sensor for tribological research

Johannes Burger; Erwin Berenschot; Gert-Jan Burger; Miko Elwenspoek; Harm Visscher

doi:10.1088/0960-1317/8/2/023

Piezoresistive friction force sensor for tribological research

Johannes Burger, Erwin Berenschot, Gert-Jan Burger, Miko Elwenspoek, Harm Visscher

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a (100) silicon water.

Original language	English
Pages (from-to)	138-140
Number of pages	3
Journal	Journal of micromechanics and microengineering
Volume	8
Issue number	2
DOIs	https://doi.org/10.1088/0960-1317/8/2/023
Publication status	Published - Jun 1998

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title = "Piezoresistive friction force sensor for tribological research",

abstract = "A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a (100) silicon water.",

author = "Johannes Burger and Erwin Berenschot and Gert-Jan Burger and Miko Elwenspoek and Harm Visscher",

note = "Special issue featuring papers from the 8th Workshop on Micromachining, Micromechanics and Microsystems (MME'97) ",

year = "1998",

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AU - Burger, Johannes

AU - Berenschot, Erwin

AU - Burger, Gert-Jan

AU - Elwenspoek, Miko

AU - Visscher, Harm

N1 - Special issue featuring papers from the 8th Workshop on Micromachining, Micromechanics and Microsystems (MME'97)

PY - 1998/6

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N2 - A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a (100) silicon water.

AB - A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a (100) silicon water.

U2 - 10.1088/0960-1317/8/2/023

DO - 10.1088/0960-1317/8/2/023

M3 - Article

SN - 0960-1317

VL - 8

SP - 138

EP - 140

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

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Piezoresistive friction force sensor for tribological research

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