Piezoresistive friction force sensor for tribological research

Johannes Faas Burger, Johan W. Berenschot, H. Visscher, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of MME Conference 1997
Place of PublicationSouthampton
Pages152-155
Publication statusPublished - 31 Aug 1997
Event8th MicroMechanics Europe Workshop, MME 1997 - Southampton, United Kingdom
Duration: 31 Aug 19972 Sept 1997
Conference number: 8

Conference

Conference8th MicroMechanics Europe Workshop, MME 1997
Abbreviated titleMME
Country/TerritoryUnited Kingdom
CitySouthampton
Period31/08/972/09/97

Keywords

  • METIS-130224
  • IR-25422

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