Pirani pressure sensor with distributed temperature measurement

B.R. de Jong, W.P. Bula, D.R. Zalewski, J.J.J. van Baar, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
66 Downloads (Pure)

Abstract

Surface micro-machined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 μm and 1.10 μm, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5% of the measured value in a pressure range of 10 to 2*104 Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.
Original languageEnglish
Title of host publicationProceedings of IEEE Sensors 2003
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages718-722
Number of pages5
ISBN (Print)0-7803-8133-5
DOIs
Publication statusPublished - 22 Oct 2003
Event2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada
Duration: 22 Oct 200324 Oct 2003
http://ewh.ieee.org/conf/sensors2003/

Conference

Conference2003 IEEE Sensors
CountryCanada
CityToronto
Period22/10/0324/10/03
Internet address

Keywords

  • EWI-12295
  • METIS-215253
  • IR-46528

Fingerprint Dive into the research topics of 'Pirani pressure sensor with distributed temperature measurement'. Together they form a unique fingerprint.

Cite this