Pirani pressure sensor with distributed temperature measurement

B.R. de Jong; W.P. Bula; D.R. Zalewski; J.J.J. van Baar; R.J. Wiegerink

doi:10.1109/ICSENS.2003.1279033

Pirani pressure sensor with distributed temperature measurement

B.R. de Jong, W.P. Bula, D.R. Zalewski, J.J.J. van Baar, R.J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)

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Abstract

Surface micro-machined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 μm and 1.10 μm, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5% of the measured value in a pressure range of 10 to 2*104 Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.

Original language	English
Title of host publication	Proceedings of IEEE Sensors 2003
Place of Publication	Piscataway
Publisher	IEEE
Pages	718-722
Number of pages	5
ISBN (Print)	0-7803-8133-5
DOIs	https://doi.org/10.1109/ICSENS.2003.1279033
Publication status	Published - 22 Oct 2003
Event	2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada Duration: 22 Oct 2003 → 24 Oct 2003 http://ewh.ieee.org/conf/sensors2003/

Conference

Conference	2003 IEEE Sensors
Country/Territory	Canada
City	Toronto
Period	22/10/03 → 24/10/03
Internet address	http://ewh.ieee.org/conf/sensors2003/

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10.1109/ICSENS.2003.1279033

DeJong2003piraniFinal published version, 372 KBLicence: Taverne

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@inproceedings{e42e9a8693f04701884c58e6dbb11619,

title = "Pirani pressure sensor with distributed temperature measurement",

abstract = "Surface micro-machined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 μm and 1.10 μm, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5% of the measured value in a pressure range of 10 to 2*104 Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.",

author = "{de Jong}, B.R. and W.P. Bula and D.R. Zalewski and {van Baar}, J.J.J. and R.J. Wiegerink",

year = "2003",

month = oct,

day = "22",

doi = "10.1109/ICSENS.2003.1279033",

language = "English",

isbn = "0-7803-8133-5",

pages = "718--722",

booktitle = "Proceedings of IEEE Sensors 2003",

publisher = "IEEE",

address = "United States",

note = "2003 IEEE Sensors : The 2nd Conference on Sensors ; Conference date: 22-10-2003 Through 24-10-2003",

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TY - GEN

T1 - Pirani pressure sensor with distributed temperature measurement

AU - de Jong, B.R.

AU - Bula, W.P.

AU - Zalewski, D.R.

AU - van Baar, J.J.J.

AU - Wiegerink, R.J.

PY - 2003/10/22

Y1 - 2003/10/22

N2 - Surface micro-machined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 μm and 1.10 μm, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5% of the measured value in a pressure range of 10 to 2*104 Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.

AB - Surface micro-machined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 μm and 1.10 μm, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5% of the measured value in a pressure range of 10 to 2*104 Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.

U2 - 10.1109/ICSENS.2003.1279033

DO - 10.1109/ICSENS.2003.1279033

M3 - Conference contribution

SN - 0-7803-8133-5

SP - 718

EP - 722

BT - Proceedings of IEEE Sensors 2003

PB - IEEE

CY - Piscataway

T2 - 2003 IEEE Sensors

Y2 - 22 October 2003 through 24 October 2003

ER -

Pirani pressure sensor with distributed temperature measurement

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