Abstract
Surface micro-machined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 μm and 1.10 μm, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5% of the measured value in a pressure range of 10 to 2*104 Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.
Original language | English |
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Title of host publication | Proceedings of IEEE Sensors 2003 |
Place of Publication | Piscataway |
Publisher | IEEE |
Pages | 718-722 |
Number of pages | 5 |
ISBN (Print) | 0-7803-8133-5 |
DOIs | |
Publication status | Published - 22 Oct 2003 |
Event | 2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada Duration: 22 Oct 2003 → 24 Oct 2003 http://ewh.ieee.org/conf/sensors2003/ |
Conference
Conference | 2003 IEEE Sensors |
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Country/Territory | Canada |
City | Toronto |
Period | 22/10/03 → 24/10/03 |
Internet address |