Pirani pressure sensor with distributed temperature sensing

J.J.J. van Baar; Remco J. Wiegerink; Gijsbertus J.M. Krijnen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

Pirani pressure sensor with distributed temperature sensing

J.J.J. van Baar, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.

Original language	Undefined
Title of host publication	ASME International Mechanical Engineering Congress and Exposition, Proceedings
Place of Publication	New York, NY, USA
Publisher	American Society of Mechanical Engineers (ASME)
Pages	2689-2696
Number of pages	8
ISBN (Print)	0791835553
Publication status	Published - 11 Nov 2001
Event	ASME International Mechanical Engineering Congress & Exposition, IMECE 2001 - New York, New York , New York, United States Duration: 11 Nov 2001 → 16 Nov 2001

Conference

Conference	ASME International Mechanical Engineering Congress & Exposition, IMECE 2001
Abbreviated title	IMECE
Country/Territory	United States
City	New York
Period	11/11/01 → 16/11/01
Other	November 11-16, 2001

Keywords

EWI-12773
METIS-201174
IR-42362

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Cite this

@inproceedings{964fcf1ca7b04eb28673a74163e14cf1,

title = "Pirani pressure sensor with distributed temperature sensing",

abstract = "A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.",

keywords = "EWI-12773, METIS-201174, IR-42362",

author = "{van Baar}, J.J.J. and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "2001",

month = nov,

day = "11",

language = "Undefined",

isbn = "0791835553",

pages = "2689--2696",

booktitle = "ASME International Mechanical Engineering Congress and Exposition, Proceedings",

publisher = "American Society of Mechanical Engineers (ASME)",

address = "United States",

note = "null ; Conference date: 11-11-2001 Through 16-11-2001",

}

van Baar, JJJ, Wiegerink, RJ , Krijnen, GJM , Lammerink, TSJ & Elwenspoek, MC 2001, Pirani pressure sensor with distributed temperature sensing. in ASME International Mechanical Engineering Congress and Exposition, Proceedings. American Society of Mechanical Engineers (ASME), New York, NY, USA, pp. 2689-2696, ASME International Mechanical Engineering Congress & Exposition, IMECE 2001 , New York, New York, United States, 11/11/01.

Pirani pressure sensor with distributed temperature sensing. / van Baar, J.J.J.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M. et al.

ASME International Mechanical Engineering Congress and Exposition, Proceedings. New York, NY, USA : American Society of Mechanical Engineers (ASME), 2001. p. 2689-2696.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Pirani pressure sensor with distributed temperature sensing

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2001/11/11

Y1 - 2001/11/11

N2 - A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.

AB - A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.

KW - EWI-12773

KW - METIS-201174

KW - IR-42362

M3 - Conference contribution

SN - 0791835553

SP - 2689

EP - 2696

BT - ASME International Mechanical Engineering Congress and Exposition, Proceedings

PB - American Society of Mechanical Engineers (ASME)

CY - New York, NY, USA

Y2 - 11 November 2001 through 16 November 2001

ER -