Pirani pressure sensor with distributed temperature sensing

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.
Original languageUndefined
Title of host publicationASME International Mechanical Engineering Congress and Exposition, Proceedings
Place of PublicationNew York, NY, USA
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages2689-2696
Number of pages8
ISBN (Print)0791835553
Publication statusPublished - 11 Nov 2001
EventASME International Mechanical Engineering Congress & Exposition, IMECE 2001 - New York, New York , New York, United States
Duration: 11 Nov 200116 Nov 2001

Conference

ConferenceASME International Mechanical Engineering Congress & Exposition, IMECE 2001
Abbreviated titleIMECE
CountryUnited States
CityNew York
Period11/11/0116/11/01
OtherNovember 11-16, 2001

Keywords

  • EWI-12773
  • METIS-201174
  • IR-42362

Cite this

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (2001). Pirani pressure sensor with distributed temperature sensing. In ASME International Mechanical Engineering Congress and Exposition, Proceedings (pp. 2689-2696). New York, NY, USA: American Society of Mechanical Engineers (ASME).
van Baar, J.J.J. ; Wiegerink, Remco J. ; Krijnen, Gijsbertus J.M. ; Lammerink, Theodorus S.J. ; Elwenspoek, Michael Curt. / Pirani pressure sensor with distributed temperature sensing. ASME International Mechanical Engineering Congress and Exposition, Proceedings. New York, NY, USA : American Society of Mechanical Engineers (ASME), 2001. pp. 2689-2696
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title = "Pirani pressure sensor with distributed temperature sensing",
abstract = "A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.",
keywords = "EWI-12773, METIS-201174, IR-42362",
author = "{van Baar}, J.J.J. and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
year = "2001",
month = "11",
day = "11",
language = "Undefined",
isbn = "0791835553",
pages = "2689--2696",
booktitle = "ASME International Mechanical Engineering Congress and Exposition, Proceedings",
publisher = "American Society of Mechanical Engineers (ASME)",
address = "United States",

}

van Baar, JJJ, Wiegerink, RJ, Krijnen, GJM, Lammerink, TSJ & Elwenspoek, MC 2001, Pirani pressure sensor with distributed temperature sensing. in ASME International Mechanical Engineering Congress and Exposition, Proceedings. American Society of Mechanical Engineers (ASME), New York, NY, USA, pp. 2689-2696, ASME International Mechanical Engineering Congress & Exposition, IMECE 2001 , New York, United States, 11/11/01.

Pirani pressure sensor with distributed temperature sensing. / van Baar, J.J.J.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

ASME International Mechanical Engineering Congress and Exposition, Proceedings. New York, NY, USA : American Society of Mechanical Engineers (ASME), 2001. p. 2689-2696.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Pirani pressure sensor with distributed temperature sensing

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2001/11/11

Y1 - 2001/11/11

N2 - A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.

AB - A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.

KW - EWI-12773

KW - METIS-201174

KW - IR-42362

M3 - Conference contribution

SN - 0791835553

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EP - 2696

BT - ASME International Mechanical Engineering Congress and Exposition, Proceedings

PB - American Society of Mechanical Engineers (ASME)

CY - New York, NY, USA

ER -

van Baar JJJ, Wiegerink RJ, Krijnen GJM, Lammerink TSJ, Elwenspoek MC. Pirani pressure sensor with distributed temperature sensing. In ASME International Mechanical Engineering Congress and Exposition, Proceedings. New York, NY, USA: American Society of Mechanical Engineers (ASME). 2001. p. 2689-2696