Pirani pressure sensor with distributed temperature sensing

J.J.J. van Baar, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

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    Abstract

    A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.
    Original languageUndefined
    Title of host publicationASME International Mechanical Engineering Congress and Exposition, Proceedings
    Place of PublicationNew York, NY, USA
    PublisherAmerican Society of Mechanical Engineers (ASME)
    Pages2689-2696
    Number of pages8
    ISBN (Print)0791835553
    Publication statusPublished - 11 Nov 2001
    EventASME International Mechanical Engineering Congress & Exposition, IMECE 2001 - New York, New York , New York, United States
    Duration: 11 Nov 200116 Nov 2001

    Conference

    ConferenceASME International Mechanical Engineering Congress & Exposition, IMECE 2001
    Abbreviated titleIMECE
    CountryUnited States
    CityNew York
    Period11/11/0116/11/01
    OtherNovember 11-16, 2001

    Keywords

    • EWI-12773
    • METIS-201174
    • IR-42362

    Cite this

    van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (2001). Pirani pressure sensor with distributed temperature sensing. In ASME International Mechanical Engineering Congress and Exposition, Proceedings (pp. 2689-2696). New York, NY, USA: American Society of Mechanical Engineers (ASME).