A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.
|Title of host publication||ASME International Mechanical Engineering Congress and Exposition, Proceedings|
|Place of Publication||New York, NY, USA|
|Publisher||American Society of Mechanical Engineers (ASME)|
|Number of pages||8|
|Publication status||Published - 11 Nov 2001|
|Event||ASME International Mechanical Engineering Congress & Exposition, IMECE 2001 - New York, New York , New York, United States|
Duration: 11 Nov 2001 → 16 Nov 2001
|Conference||ASME International Mechanical Engineering Congress & Exposition, IMECE 2001|
|Period||11/11/01 → 16/11/01|
|Other||November 11-16, 2001|
van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (2001). Pirani pressure sensor with distributed temperature sensing. In ASME International Mechanical Engineering Congress and Exposition, Proceedings (pp. 2689-2696). New York, NY, USA: American Society of Mechanical Engineers (ASME).