Pirani pressure sensor with distributed temperature sensing

J.J. van Baar; R.J. Wiegerink; T.S.J. Lammerink; G.J.M. Krijnen; M. Elwenspoek

doi:10.1115/IMECE2001/MEMS-23817

Pirani pressure sensor with distributed temperature sensing

J.J. van Baar^*, R.J. Wiegerink, T.S.J. Lammerink, G.J.M. Krijnen, M. Elwenspoek

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

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Abstract

A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.

Original language	English
Title of host publication	ASME 2001 International Mechanical Engineering Congress & Exposition
Subtitle of host publication	Conference Proceedings
Editors	A.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
Publisher	American Society of Mechanical Engineers
Pages	115-122
Number of pages	8
ISBN (Print)	978-0-7918-3555-5
DOIs	https://doi.org/10.1115/IMECE2001/MEMS-23817
Publication status	Published - 2001
Event	ASME International Mechanical Engineering Congress and Exposition, IMECE 2001 - New York, NY, United States Duration: 11 Nov 2001 → 16 Nov 2001

Conference

Conference	ASME International Mechanical Engineering Congress and Exposition, IMECE 2001
Abbreviated title	IMECE 2001
Country/Territory	United States
City	New York, NY
Period	11/11/01 → 16/11/01

Keywords

2023 OA procedure

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10.1115/IMECE2001/MEMS-23817

ArticleFinal published version, 167 KBLicence: Taverne

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van Baar, J. J., Wiegerink, R. J., Lammerink, T. S. J., Krijnen, G. J. M., & Elwenspoek, M. (2001). Pirani pressure sensor with distributed temperature sensing. In A. L. Lee, J. Simon, K. Breuer, S. Chen, R. S. Keynton, A. Malshe, J.-I. Mou, & M. Dunn (Eds.), ASME 2001 International Mechanical Engineering Congress & Exposition: Conference Proceedings (pp. 115-122). American Society of Mechanical Engineers. https://doi.org/10.1115/IMECE2001/MEMS-23817

van Baar, J.J. ; Wiegerink, R.J. ; Lammerink, T.S.J. et al. / Pirani pressure sensor with distributed temperature sensing. ASME 2001 International Mechanical Engineering Congress & Exposition: Conference Proceedings. editor / A.L. Lee ; J. Simon ; K. Breuer ; S. Chen ; R.S. Keynton ; A. Malshe ; J.-I. Mou ; M. Dunn. American Society of Mechanical Engineers, 2001. pp. 115-122

@inproceedings{d8851c00fbd9410fa1e7d5c2538638f6,

title = "Pirani pressure sensor with distributed temperature sensing",

abstract = "A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.",

keywords = "2023 OA procedure",

author = "{van Baar}, J.J. and R.J. Wiegerink and T.S.J. Lammerink and G.J.M. Krijnen and M. Elwenspoek",

year = "2001",

doi = "10.1115/IMECE2001/MEMS-23817",

language = "English",

isbn = "978-0-7918-3555-5",

pages = "115--122",

editor = "A.L. Lee and J. Simon and K. Breuer and S. Chen and R.S. Keynton and A. Malshe and J.-I. Mou and M. Dunn",

booktitle = "ASME 2001 International Mechanical Engineering Congress & Exposition",

publisher = "American Society of Mechanical Engineers",

address = "United States",

note = "ASME International Mechanical Engineering Congress and Exposition, IMECE 2001, IMECE 2001 ; Conference date: 11-11-2001 Through 16-11-2001",

}

van Baar, JJ, Wiegerink, RJ, Lammerink, TSJ, Krijnen, GJM & Elwenspoek, M 2001, Pirani pressure sensor with distributed temperature sensing. in AL Lee, J Simon, K Breuer, S Chen, RS Keynton, A Malshe, J-I Mou & M Dunn (eds), ASME 2001 International Mechanical Engineering Congress & Exposition: Conference Proceedings. American Society of Mechanical Engineers, pp. 115-122, ASME International Mechanical Engineering Congress and Exposition, IMECE 2001, New York, NY, United States, 11/11/01. https://doi.org/10.1115/IMECE2001/MEMS-23817

Pirani pressure sensor with distributed temperature sensing. / van Baar, J.J.; Wiegerink, R.J.; Lammerink, T.S.J. et al.
ASME 2001 International Mechanical Engineering Congress & Exposition: Conference Proceedings. ed. / A.L. Lee; J. Simon; K. Breuer; S. Chen; R.S. Keynton; A. Malshe; J.-I. Mou; M. Dunn. American Society of Mechanical Engineers, 2001. p. 115-122.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Pirani pressure sensor with distributed temperature sensing

AU - van Baar, J.J.

AU - Wiegerink, R.J.

AU - Lammerink, T.S.J.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.

PY - 2001

Y1 - 2001

N2 - A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.

AB - A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead of the average temperature of the beam has two advantages: the measurement becomes independent of the Temperature Coefficient of Resistance of the temperature sensing resistors and the heat loss to the substrate is implicitly taken in account, which extends the lower pressure range.

KW - 2023 OA procedure

UR - http://www.scopus.com/inward/record.url?scp=1542747874&partnerID=8YFLogxK

U2 - 10.1115/IMECE2001/MEMS-23817

DO - 10.1115/IMECE2001/MEMS-23817

M3 - Conference contribution

AN - SCOPUS:1542747874

SN - 978-0-7918-3555-5

SP - 115

EP - 122

BT - ASME 2001 International Mechanical Engineering Congress & Exposition

A2 - Lee, A.L.

A2 - Simon, J.

A2 - Breuer, K.

A2 - Chen, S.

A2 - Keynton, R.S.

A2 - Malshe, A.

A2 - Mou, J.-I.

A2 - Dunn, M.

PB - American Society of Mechanical Engineers

T2 - ASME International Mechanical Engineering Congress and Exposition, IMECE 2001

Y2 - 11 November 2001 through 16 November 2001

ER -

van Baar JJ, Wiegerink RJ, Lammerink TSJ, Krijnen GJM, Elwenspoek M. Pirani pressure sensor with distributed temperature sensing. In Lee AL, Simon J, Breuer K, Chen S, Keynton RS, Malshe A, Mou JI, Dunn M, editors, ASME 2001 International Mechanical Engineering Congress & Exposition: Conference Proceedings. American Society of Mechanical Engineers. 2001. p. 115-122 doi: 10.1115/IMECE2001/MEMS-23817

Pirani pressure sensor with distributed temperature sensing

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Pirani pressure sensor with distributed temperature sensing

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