Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

Wouter Olthuis, A.J. Sprenkels, Johan G. Bomer, Piet Bergveld

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    Abstract

    Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.
    Original languageUndefined
    Pages (from-to)211-216
    Number of pages6
    JournalSensors and actuators. B: Chemical
    Volume1997
    Issue number43
    DOIs
    Publication statusPublished - 1997

    Keywords

    • METIS-111982
    • IR-15106

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