Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

Wouter Olthuis, A.J. Sprenkels, Johan G. Bomer, Piet Bergveld

    Research output: Contribution to journalArticleAcademicpeer-review

    32 Citations (Scopus)
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    Abstract

    Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.
    Original languageUndefined
    Pages (from-to)211-216
    Number of pages6
    JournalSensors and actuators. B: Chemical
    Volume1997
    Issue number43
    DOIs
    Publication statusPublished - 1997

    Keywords

    • METIS-111982
    • IR-15106

    Cite this

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    title = "Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5",
    abstract = "Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.",
    keywords = "METIS-111982, IR-15106",
    author = "Wouter Olthuis and A.J. Sprenkels and Bomer, {Johan G.} and Piet Bergveld",
    year = "1997",
    doi = "10.1016/S0925-4005(97)00157-3",
    language = "Undefined",
    volume = "1997",
    pages = "211--216",
    journal = "Sensors and actuators. B: Chemical",
    issn = "0925-4005",
    publisher = "Elsevier",
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    Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5. / Olthuis, Wouter; Sprenkels, A.J.; Bomer, Johan G.; Bergveld, Piet.

    In: Sensors and actuators. B: Chemical, Vol. 1997, No. 43, 1997, p. 211-216.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

    AU - Olthuis, Wouter

    AU - Sprenkels, A.J.

    AU - Bomer, Johan G.

    AU - Bergveld, Piet

    PY - 1997

    Y1 - 1997

    N2 - Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.

    AB - Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.

    KW - METIS-111982

    KW - IR-15106

    U2 - 10.1016/S0925-4005(97)00157-3

    DO - 10.1016/S0925-4005(97)00157-3

    M3 - Article

    VL - 1997

    SP - 211

    EP - 216

    JO - Sensors and actuators. B: Chemical

    JF - Sensors and actuators. B: Chemical

    SN - 0925-4005

    IS - 43

    ER -