Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

Wouter Olthuis; A.J. Sprenkels; Johan G. Bomer; Piet Bergveld

doi:10.1016/S0925-4005(97)00157-3

Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

Wouter Olthuis, A.J. Sprenkels, Johan G. Bomer, Piet Bergveld

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.

Original language	Undefined
Pages (from-to)	211-216
Number of pages	6
Journal	Sensors and Actuators B: Chemical
Volume	1997
Issue number	43
DOIs	https://doi.org/10.1016/S0925-4005(97)00157-3
Publication status	Published - 1997

Keywords

METIS-111982
IR-15106

Access to Document

10.1016/S0925-4005(97)00157-3

Olthuis97planar

Cite this

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title = "Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5",

abstract = "Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.",

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AU - Sprenkels, A.J.

AU - Bomer, Johan G.

AU - Bergveld, Piet

PY - 1997

Y1 - 1997

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AB - Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.

KW - METIS-111982

KW - IR-15106

U2 - 10.1016/S0925-4005(97)00157-3

DO - 10.1016/S0925-4005(97)00157-3

M3 - Article

SN - 0925-4005

VL - 1997

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EP - 216

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

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