Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

Wouter Olthuis, A.J. Sprenkels, Johan G. Bomer, Piet Bergveld

Research output: Contribution to journalArticleAcademicpeer-review

32 Citations (Scopus)
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Abstract

Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.
Original languageUndefined
Pages (from-to)211-216
Number of pages6
JournalSensors and actuators. B: Chemical
Volume1997
Issue number43
DOIs
Publication statusPublished - 1997

Keywords

  • METIS-111982
  • IR-15106

Cite this

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title = "Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5",
abstract = "Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.",
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year = "1997",
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volume = "1997",
pages = "211--216",
journal = "Sensors and actuators. B: Chemical",
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Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5. / Olthuis, Wouter; Sprenkels, A.J.; Bomer, Johan G.; Bergveld, Piet.

In: Sensors and actuators. B: Chemical, Vol. 1997, No. 43, 1997, p. 211-216.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

AU - Olthuis, Wouter

AU - Sprenkels, A.J.

AU - Bomer, Johan G.

AU - Bergveld, Piet

PY - 1997

Y1 - 1997

N2 - Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.

AB - Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.

KW - METIS-111982

KW - IR-15106

U2 - 10.1016/S0925-4005(97)00157-3

DO - 10.1016/S0925-4005(97)00157-3

M3 - Article

VL - 1997

SP - 211

EP - 216

JO - Sensors and actuators. B: Chemical

JF - Sensors and actuators. B: Chemical

SN - 0925-4005

IS - 43

ER -