Planar MoRe-based direct current nanoSQUID

A.G. Shishkin; O.V. Skryabina; V.L. Gurtovoi; S.E. Dizhur; M.I. Faley; A.A. Golubov; V.S. Stolyarov

doi:10.1088/1361-6668/ab877c

Planar MoRe-based direct current nanoSQUID

A.G. Shishkin, O.V. Skryabina, V.L. Gurtovoi, S.E. Dizhur^*, M.I. Faley, A.A. Golubov, V.S. Stolyarov

^*Corresponding author for this work

Interfaces and Correlated Electron Systems

Research output: Contribution to journal › Article › Academic › peer-review

6 Citations (Scopus)

147 Downloads (Pure)

Abstract

We have developed planar nanoSQUID with nanobridge-type Josephson junctions based on the oxidation resistant and high H _c2 MoRe alloy. The objective of the research was to reduce size of the SQUID loop with the aim being to reduce magnetic flux noise and improve the spatial resolution of the SQUID sensors. Employing RF-magnetron sputtering, electron-beam lithography, and reactive ion etching in CHF₃ + O₂ plasma using Al hard masks, we have realized nanoSQUIDs with Josephson junctions in the form of 30 - 50 nm wide nanobridges and an effective magnetic flux capture radius of ∼ 95 nm. The critical temperature of the fabricated devices was T _c = 7.9 K. The I(V)-characteristics demonstrated critical current I ₀≃ 114 µA at 4.2 K and modulation period in magnetic fields of ∼ 700 Oe.

Original language	English
Article number	065005
Journal	Superconductor science and technology
Volume	33
Issue number	6
DOIs	https://doi.org/10.1088/1361-6668/ab877c
Publication status	Published - Jun 2020

Keywords

Molybdenum Rhenium
MoRe
nanobridges
nanoSQUID
scanning SQUID microscopy
22/2 OA procedure

Access to Document

10.1088/1361-6668/ab877c

ArticleFinal published version, 935 KBLicence: Taverne

Cite this

@article{c6325da51dc7401b97a83a009a61bf00,

title = "Planar MoRe-based direct current nanoSQUID",

abstract = "We have developed planar nanoSQUID with nanobridge-type Josephson junctions based on the oxidation resistant and high H c2 MoRe alloy. The objective of the research was to reduce size of the SQUID loop with the aim being to reduce magnetic flux noise and improve the spatial resolution of the SQUID sensors. Employing RF-magnetron sputtering, electron-beam lithography, and reactive ion etching in CHF3 + O2 plasma using Al hard masks, we have realized nanoSQUIDs with Josephson junctions in the form of 30 - 50 nm wide nanobridges and an effective magnetic flux capture radius of ∼ 95 nm. The critical temperature of the fabricated devices was T c = 7.9 K. The I(V)-characteristics demonstrated critical current I 0≃ 114 µA at 4.2 K and modulation period in magnetic fields of ∼ 700 Oe.",

keywords = "Molybdenum Rhenium, MoRe, nanobridges, nanoSQUID, scanning SQUID microscopy, 22/2 OA procedure",

author = "A.G. Shishkin and O.V. Skryabina and V.L. Gurtovoi and S.E. Dizhur and M.I. Faley and A.A. Golubov and V.S. Stolyarov",

year = "2020",

month = jun,

doi = "10.1088/1361-6668/ab877c",

language = "English",

volume = "33",

journal = "Superconductor science and technology",

issn = "0953-2048",

publisher = "Institute of Physics (IOP)",

number = "6",

}

TY - JOUR

T1 - Planar MoRe-based direct current nanoSQUID

AU - Shishkin, A.G.

AU - Skryabina, O.V.

AU - Gurtovoi, V.L.

AU - Dizhur, S.E.

AU - Faley, M.I.

AU - Golubov, A.A.

AU - Stolyarov, V.S.

PY - 2020/6

Y1 - 2020/6

N2 - We have developed planar nanoSQUID with nanobridge-type Josephson junctions based on the oxidation resistant and high H c2 MoRe alloy. The objective of the research was to reduce size of the SQUID loop with the aim being to reduce magnetic flux noise and improve the spatial resolution of the SQUID sensors. Employing RF-magnetron sputtering, electron-beam lithography, and reactive ion etching in CHF3 + O2 plasma using Al hard masks, we have realized nanoSQUIDs with Josephson junctions in the form of 30 - 50 nm wide nanobridges and an effective magnetic flux capture radius of ∼ 95 nm. The critical temperature of the fabricated devices was T c = 7.9 K. The I(V)-characteristics demonstrated critical current I 0≃ 114 µA at 4.2 K and modulation period in magnetic fields of ∼ 700 Oe.

AB - We have developed planar nanoSQUID with nanobridge-type Josephson junctions based on the oxidation resistant and high H c2 MoRe alloy. The objective of the research was to reduce size of the SQUID loop with the aim being to reduce magnetic flux noise and improve the spatial resolution of the SQUID sensors. Employing RF-magnetron sputtering, electron-beam lithography, and reactive ion etching in CHF3 + O2 plasma using Al hard masks, we have realized nanoSQUIDs with Josephson junctions in the form of 30 - 50 nm wide nanobridges and an effective magnetic flux capture radius of ∼ 95 nm. The critical temperature of the fabricated devices was T c = 7.9 K. The I(V)-characteristics demonstrated critical current I 0≃ 114 µA at 4.2 K and modulation period in magnetic fields of ∼ 700 Oe.

KW - Molybdenum Rhenium

KW - MoRe

KW - nanobridges

KW - nanoSQUID

KW - scanning SQUID microscopy

KW - 22/2 OA procedure

UR - http://www.scopus.com/inward/record.url?scp=85085842575&partnerID=8YFLogxK

U2 - 10.1088/1361-6668/ab877c

DO - 10.1088/1361-6668/ab877c

M3 - Article

AN - SCOPUS:85085842575

SN - 0953-2048

VL - 33

JO - Superconductor science and technology

JF - Superconductor science and technology

IS - 6

M1 - 065005

ER -

Planar MoRe-based direct current nanoSQUID

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this