Planar refractive lenses made of SiC for high intensity nanofocusing

Mikhail Lyubomirskiy*, Bart Schurink, Igor A. Makhotkin, Dennis Brueckner, Felix Wittwer, Maik Kahnt, Martin Seyrich, Frank Seiboth, Fred Bijkerk, Christian G. Schroer

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm×275 nm has been achieved with a lens working distance of 29 mm.

Original languageEnglish
Pages (from-to)14025-14032
Number of pages8
JournalOptics express
Volume29
Issue number9
DOIs
Publication statusPublished - 26 Apr 2021

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