Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back

V.L. Spiering, Johan W. Berenschot, Michael Curt Elwenspoek

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 6 Sep 1994
    Event5th MicroMechanics Europe Workshop, MME 1994 - Pisa, Italy
    Duration: 5 Sep 19946 Sep 1994
    Conference number: 5

    Conference

    Conference5th MicroMechanics Europe Workshop, MME 1994
    Abbreviated titleMME
    CountryItaly
    CityPisa
    Period5/09/946/09/94

    Keywords

    • METIS-114660

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