Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back

V.L. Spiering, Johan W. Berenschot, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 6 Sept 1994
Event	5th MicroMechanics Europe Workshop, MME 1994 - Pisa, Italy Duration: 5 Sept 1994 → 6 Sept 1994 Conference number: 5

Conference	5th MicroMechanics Europe Workshop, MME 1994
Abbreviated title	MME
Country/Territory	Italy
City	Pisa
Period	5/09/94 → 6/09/94

Keywords

@conference{3c126f38883c42efac6a53f38d9ba173,

title = "Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back",

keywords = "METIS-114660",

author = "V.L. Spiering and Berenschot, \{Johan W.\} and Elwenspoek, \{Michael Curt\}",

year = "1994",

month = sep,

day = "6",

language = "Undefined",

pages = "--",

note = "5th MicroMechanics Europe Workshop, MME 1994 ; Conference date: 05-09-1994 Through 06-09-1994",

}

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back

AU - Spiering, V.L.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 5

PY - 1994/9/6

Y1 - 1994/9/6

KW - METIS-114660

M3 - Poster

SP - -

T2 - 5th MicroMechanics Europe Workshop, MME 1994

Y2 - 5 September 1994 through 6 September 1994

ER -