Planarization and fabrication of bridges across groves or holes in silicon using a dry film photoresist followed by an etch back

V.L. Spiering, Johan W. Berenschot, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	189-192
Journal	Journal of micromechanics and microengineering
Issue number	5
Publication status	Published - 1995

Keywords

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title = "Planarization and fabrication of bridges across groves or holes in silicon using a dry film photoresist followed by an etch back",

keywords = "METIS-129073",

author = "V.L. Spiering and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt}",

year = "1995",

language = "Undefined",

pages = "189--192",

journal = "Journal of micromechanics and microengineering",

issn = "0960-1317",

publisher = "Institute of Physics (IOP)",

number = "5",

}

TY - JOUR

T1 - Planarization and fabrication of bridges across groves or holes in silicon using a dry film photoresist followed by an etch back

AU - Spiering, V.L.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

PY - 1995

Y1 - 1995

KW - METIS-129073

M3 - Article

SN - 0960-1317

SP - 189

EP - 192

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

IS - 5

ER -