Planarization and fabrication of bridges across groves or holes in silicon using a dry film photoresist followed by an etch back

V.L. Spiering, Johan W. Berenschot, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)189-192
    JournalJournal of micromechanics and microengineering
    Issue number5
    Publication statusPublished - 1995


    • METIS-129073

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