Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers

Gyula J. Vancso, S. Golze, Mark A. Hempenius, H. Hillborg, I. Korczagin, Rob G.H. Lammertink

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publication226th ACS National Meeting
PublisherAmerican Chemical Society
Pages197-198
Number of pages2
Publication statusPublished - 7 Sep 2003
Event226th ACS National Meeting: Fall 2003 - New York City, United States
Duration: 7 Sep 200311 Sep 2003
Conference number: 226

Publication series

Name
Number2
Volume44
ISSN (Print)0032-3934

Conference

Conference226th ACS National Meeting
CountryUnited States
CityNew York City
Period7/09/0311/09/03

Keywords

  • METIS-213285

Cite this

Vancso, G. J., Golze, S., Hempenius, M. A., Hillborg, H., Korczagin, I., & Lammertink, R. G. H. (2003). Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers. In 226th ACS National Meeting (pp. 197-198). American Chemical Society.