Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	226th ACS National Meeting
Publisher	American Chemical Society
Pages	197-198
Number of pages	2
Publication status	Published - 7 Sept 2003
Event	226th ACS National Meeting: Fall 2003 - New York City, United States Duration: 7 Sept 2003 → 11 Sept 2003 Conference number: 226

Keywords

@inproceedings{399736dc00c848759c409b26cb1137ad,

title = "Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers",

keywords = "METIS-213285",

author = "Vancso, {Gyula J.} and S. Golze and Hempenius, {Mark A.} and H. Hillborg and I. Korczagin and Lammertink, {Rob G.H.}",

year = "2003",

month = sep,

day = "7",

language = "Undefined",

publisher = "American Chemical Society",

number = "2",

pages = "197--198",

booktitle = "226th ACS National Meeting",

address = "United States",

note = "226th ACS National Meeting ; Conference date: 07-09-2003 Through 11-09-2003",

}

TY - GEN

T1 - Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers

AU - Vancso, Gyula J.

AU - Golze, S.

AU - Hempenius, Mark A.

AU - Hillborg, H.

AU - Korczagin, I.

AU - Lammertink, Rob G.H.

N1 - Conference code: 226

PY - 2003/9/7

Y1 - 2003/9/7

KW - METIS-213285

M3 - Conference contribution

SP - 197

EP - 198

BT - 226th ACS National Meeting

PB - American Chemical Society

T2 - 226th ACS National Meeting

Y2 - 7 September 2003 through 11 September 2003

ER -