Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers

Gyula J. Vancso, S. Golze, Mark A. Hempenius, H. Hillborg, I. Korczagin, Rob G.H. Lammertink

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publication226th ACS National Meeting
PublisherAmerican Chemical Society
Pages197-198
Number of pages2
Publication statusPublished - 7 Sep 2003
Event226th ACS National Meeting: Fall 2003 - New York City, United States
Duration: 7 Sep 200311 Sep 2003
Conference number: 226

Publication series

Name
Number2
Volume44
ISSN (Print)0032-3934

Conference

Conference226th ACS National Meeting
CountryUnited States
CityNew York City
Period7/09/0311/09/03

Keywords

  • METIS-213285

Cite this

Vancso, G. J., Golze, S., Hempenius, M. A., Hillborg, H., Korczagin, I., & Lammertink, R. G. H. (2003). Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers. In 226th ACS National Meeting (pp. 197-198). American Chemical Society.
Vancso, Gyula J. ; Golze, S. ; Hempenius, Mark A. ; Hillborg, H. ; Korczagin, I. ; Lammertink, Rob G.H. / Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers. 226th ACS National Meeting. American Chemical Society, 2003. pp. 197-198
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title = "Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers",
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year = "2003",
month = "9",
day = "7",
language = "Undefined",
publisher = "American Chemical Society",
number = "2",
pages = "197--198",
booktitle = "226th ACS National Meeting",
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Vancso, GJ, Golze, S, Hempenius, MA, Hillborg, H, Korczagin, I & Lammertink, RGH 2003, Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers. in 226th ACS National Meeting. American Chemical Society, pp. 197-198, 226th ACS National Meeting, New York City, United States, 7/09/03.

Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers. / Vancso, Gyula J.; Golze, S.; Hempenius, Mark A.; Hillborg, H.; Korczagin, I.; Lammertink, Rob G.H.

226th ACS National Meeting. American Chemical Society, 2003. p. 197-198.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers

AU - Vancso, Gyula J.

AU - Golze, S.

AU - Hempenius, Mark A.

AU - Hillborg, H.

AU - Korczagin, I.

AU - Lammertink, Rob G.H.

PY - 2003/9/7

Y1 - 2003/9/7

KW - METIS-213285

M3 - Conference contribution

SP - 197

EP - 198

BT - 226th ACS National Meeting

PB - American Chemical Society

ER -

Vancso GJ, Golze S, Hempenius MA, Hillborg H, Korczagin I, Lammertink RGH. Plasma-Assisted Nanolithography with Organometallic Homo- and Block Copolymers. In 226th ACS National Meeting. American Chemical Society. 2003. p. 197-198