Plasma-assisted oxide removal from ruthenium-coated EUV optics

A. Dolgov, C.J. Lee, F. Bijkerk, A. Abrikosov, V.M. Krivtsun, D. Lopaev, O. Yakushev, M. van Kampen

Research output: Contribution to journal › Article › Academic › peer-review

3 Citations (Scopus)
607 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Plasma-assisted oxide removal from ruthenium-coated EUV optics'. Together they form a unique fingerprint.

Material Science

Engineering