Plasma-charging damage of floating MIM capacitors

Zhichun Wang; Jan Ackaert; Cora Salm; F.G. Kuper; Marnix Tack; Eddy de Backer; Peter Coppens; Luc De Schepper; Basil Vlachakis

doi:10.1109/TED.2004.829518

Plasma-charging damage of floating MIM capacitors

Zhichun Wang, Jan Ackaert, Cora Salm, F.G. Kuper, Marnix Tack, Eddy de Backer, Peter Coppens, Luc De Schepper, Basil Vlachakis

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

In this paper, the mechanism of plasma-charging damage (PCD) of metal-insulator-metal (MIM) capacitors as well as possible protection schemes are discussed. A range of test structures with different antennas simulating interconnect layout variations have been used to investigate the mechanism of PCD of MIM capacitors. Based on the experimental results, two models are presented, describing the relation between the damage and the ratio of the area of the exposed antennas connected to the MIM capacitors plates. New design rules are proposed in order to predict and automatically flag possible PCD sites. Furthermore, layout solutions to reduce PCD are suggested.

Original language	Undefined
Pages (from-to)	1017-1024
Number of pages	8
Journal	IEEE Transactions on Electron Devices
Volume	51
Issue number	6
DOIs	https://doi.org/10.1109/TED.2004.829518
Publication status	Published - 1 Jun 2004

Keywords

METIS-218014
IR-47482
metal–insulator–metal (MIM)
plasma-charging damage (PCD)
Antenna ratio (AR)
EWI-15527
metalinsulatormetal(MIM)

Access to Document

10.1109/TED.2004.829518

plasma-charging-wang

http://eprints.eemcs.utwente.nl/secure2/15527/01/2004_ted_wang.pdf

Cite this

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title = "Plasma-charging damage of floating MIM capacitors",

abstract = "In this paper, the mechanism of plasma-charging damage (PCD) of metal-insulator-metal (MIM) capacitors as well as possible protection schemes are discussed. A range of test structures with different antennas simulating interconnect layout variations have been used to investigate the mechanism of PCD of MIM capacitors. Based on the experimental results, two models are presented, describing the relation between the damage and the ratio of the area of the exposed antennas connected to the MIM capacitors plates. New design rules are proposed in order to predict and automatically flag possible PCD sites. Furthermore, layout solutions to reduce PCD are suggested.",

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T1 - Plasma-charging damage of floating MIM capacitors

AU - Wang, Zhichun

AU - Ackaert, Jan

AU - Salm, Cora

AU - Kuper, F.G.

AU - Tack, Marnix

AU - de Backer, Eddy

AU - Coppens, Peter

AU - De Schepper, Luc

AU - Vlachakis, Basil

PY - 2004/6/1

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N2 - In this paper, the mechanism of plasma-charging damage (PCD) of metal-insulator-metal (MIM) capacitors as well as possible protection schemes are discussed. A range of test structures with different antennas simulating interconnect layout variations have been used to investigate the mechanism of PCD of MIM capacitors. Based on the experimental results, two models are presented, describing the relation between the damage and the ratio of the area of the exposed antennas connected to the MIM capacitors plates. New design rules are proposed in order to predict and automatically flag possible PCD sites. Furthermore, layout solutions to reduce PCD are suggested.

AB - In this paper, the mechanism of plasma-charging damage (PCD) of metal-insulator-metal (MIM) capacitors as well as possible protection schemes are discussed. A range of test structures with different antennas simulating interconnect layout variations have been used to investigate the mechanism of PCD of MIM capacitors. Based on the experimental results, two models are presented, describing the relation between the damage and the ratio of the area of the exposed antennas connected to the MIM capacitors plates. New design rules are proposed in order to predict and automatically flag possible PCD sites. Furthermore, layout solutions to reduce PCD are suggested.

KW - METIS-218014

KW - IR-47482

KW - metal–insulator–metal (MIM)

KW - plasma-charging damage (PCD)

KW - Antenna ratio (AR)

KW - EWI-15527

KW - metalinsulatormetal(MIM)

U2 - 10.1109/TED.2004.829518

DO - 10.1109/TED.2004.829518

M3 - Article

VL - 51

SP - 1017

EP - 1024

JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

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