Plasma charging damage reduction in IC processing by a self-balancing interconnect

Z. Wang, J. Ackaert, C. Salm, F.G. Kuper, E. De Backer

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    Abstract

    A small TPC has been read out by means of a Medipix2 chip as direct anode. A Micromegas foil was placed Click to view the MathML source above the chip, and electron multiplication occurred in the gap. With a He/isobutane 80/20 mixture, gas multiplication factors up to tens of thousands were achieved, resulting in an efficiency for detecting single electrons of better than 90%. With this new readout technology for gas-filled detectors we recorded many image frames containing 2D images with tracks from cosmic muons. Along these tracks, electron clusters were observed, as well as ?-rays. With a gas layer thickness of only 1 mm, the device could be applied as vertex detector, outperforming all Si-based detectors.
    Original languageEnglish
    Pages (from-to)1503-1507
    Number of pages5
    JournalMicroelectronics reliability
    Volume44
    Issue number9-11
    DOIs
    Publication statusPublished - 4 Oct 2004
    Event15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 2004 - Zurich, Switzerland
    Duration: 4 Oct 20048 Oct 2004
    Conference number: 15

    Keywords

    • EWI-15531
    • METIS-220200
    • Integrated circuits
    • Contact line
    • Circuit design
    • Complementary MOS technology
    • IR-67728

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