Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics

Kerstin Worhoff, A. Driessen, Paul Lambeck, L.T.H. Hilderink, Petrus W.C. Linders, T.J.A. Popma

Research output: Contribution to journalArticleAcademicpeer-review

117 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy