Plasma etching in microtechnology

Henricus V. Jansen

    Research output: Thesis › PhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Fluitman, J.H.J., Supervisor
    • Elwenspoek, Michael Curt, Advisor
    Award date4 Apr 1996
    Place of PublicationEnschede
    Publisher
    Print ISBNs903650810x
    Publication statusPublished - 4 Apr 1996

    Keywords

    • METIS-111368

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