Plasma Propulsion of a Metallic Microdroplet and its Deformation upon Laser Impact

D. Kurilovich, Alexander Ludwig Klein, F. Torretti, A. Lassise, R. Hoekstra, W. Ubachs, Hanneke Gelderblom, O.O. Versolato

Research output: Contribution to journalArticleAcademicpeer-review

34 Citations (Scopus)
92 Downloads (Pure)

Abstract

The propulsion of a liquid indium-tin microdroplet by nanosecond-pulse laser impact is experimentally investigated. We capture the physics of the droplet propulsion in a scaling law that accurately describes the plasma-imparted momentum transfer over nearly three decades of pulse energy, enabling the optimization of the laser-droplet coupling. The subsequent deformation of the droplet is described by an analytical model that accounts for the droplet’s propulsion velocity and the liquid properties. Comparing our findings to those from vaporization-accelerated millimeter-sized water droplets, we demonstrate that the fluid-dynamic response of laser-impacted droplets is scalable and decoupled from the propulsion mechanism. By contrast, the physics behind the propulsion of liquid-metal droplets differs from that of water. It is studied here in detail and under industrially relevant conditions as found in next-generation nanolithography machines.
Original languageEnglish
Article number014018
Pages (from-to)014018-
Number of pages8
JournalPhysical review applied
Volume6
Issue number1
DOIs
Publication statusPublished - 2016

Fingerprint

plasma propulsion
propulsion
lasers
physics
fluid dynamics
liquids
liquid metals
pulses
dynamic response
scaling laws
water
momentum transfer
indium
tin
optimization

Keywords

  • METIS-317371
  • IR-101179

Cite this

Kurilovich, D., Klein, A. L., Torretti, F., Lassise, A., Hoekstra, R., Ubachs, W., ... Versolato, O. O. (2016). Plasma Propulsion of a Metallic Microdroplet and its Deformation upon Laser Impact. Physical review applied, 6(1), 014018-. [014018]. https://doi.org/10.1103/PhysRevApplied.6.014018
Kurilovich, D. ; Klein, Alexander Ludwig ; Torretti, F. ; Lassise, A. ; Hoekstra, R. ; Ubachs, W. ; Gelderblom, Hanneke ; Versolato, O.O. / Plasma Propulsion of a Metallic Microdroplet and its Deformation upon Laser Impact. In: Physical review applied. 2016 ; Vol. 6, No. 1. pp. 014018-.
@article{a1961f40dbe643b2b050425c00ebaabf,
title = "Plasma Propulsion of a Metallic Microdroplet and its Deformation upon Laser Impact",
abstract = "The propulsion of a liquid indium-tin microdroplet by nanosecond-pulse laser impact is experimentally investigated. We capture the physics of the droplet propulsion in a scaling law that accurately describes the plasma-imparted momentum transfer over nearly three decades of pulse energy, enabling the optimization of the laser-droplet coupling. The subsequent deformation of the droplet is described by an analytical model that accounts for the droplet’s propulsion velocity and the liquid properties. Comparing our findings to those from vaporization-accelerated millimeter-sized water droplets, we demonstrate that the fluid-dynamic response of laser-impacted droplets is scalable and decoupled from the propulsion mechanism. By contrast, the physics behind the propulsion of liquid-metal droplets differs from that of water. It is studied here in detail and under industrially relevant conditions as found in next-generation nanolithography machines.",
keywords = "METIS-317371, IR-101179",
author = "D. Kurilovich and Klein, {Alexander Ludwig} and F. Torretti and A. Lassise and R. Hoekstra and W. Ubachs and Hanneke Gelderblom and O.O. Versolato",
year = "2016",
doi = "10.1103/PhysRevApplied.6.014018",
language = "English",
volume = "6",
pages = "014018--",
journal = "Physical review applied",
issn = "2331-7019",
publisher = "American Physical Society",
number = "1",

}

Kurilovich, D, Klein, AL, Torretti, F, Lassise, A, Hoekstra, R, Ubachs, W, Gelderblom, H & Versolato, OO 2016, 'Plasma Propulsion of a Metallic Microdroplet and its Deformation upon Laser Impact', Physical review applied, vol. 6, no. 1, 014018, pp. 014018-. https://doi.org/10.1103/PhysRevApplied.6.014018

Plasma Propulsion of a Metallic Microdroplet and its Deformation upon Laser Impact. / Kurilovich, D.; Klein, Alexander Ludwig; Torretti, F.; Lassise, A.; Hoekstra, R.; Ubachs, W.; Gelderblom, Hanneke; Versolato, O.O.

In: Physical review applied, Vol. 6, No. 1, 014018, 2016, p. 014018-.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Plasma Propulsion of a Metallic Microdroplet and its Deformation upon Laser Impact

AU - Kurilovich, D.

AU - Klein, Alexander Ludwig

AU - Torretti, F.

AU - Lassise, A.

AU - Hoekstra, R.

AU - Ubachs, W.

AU - Gelderblom, Hanneke

AU - Versolato, O.O.

PY - 2016

Y1 - 2016

N2 - The propulsion of a liquid indium-tin microdroplet by nanosecond-pulse laser impact is experimentally investigated. We capture the physics of the droplet propulsion in a scaling law that accurately describes the plasma-imparted momentum transfer over nearly three decades of pulse energy, enabling the optimization of the laser-droplet coupling. The subsequent deformation of the droplet is described by an analytical model that accounts for the droplet’s propulsion velocity and the liquid properties. Comparing our findings to those from vaporization-accelerated millimeter-sized water droplets, we demonstrate that the fluid-dynamic response of laser-impacted droplets is scalable and decoupled from the propulsion mechanism. By contrast, the physics behind the propulsion of liquid-metal droplets differs from that of water. It is studied here in detail and under industrially relevant conditions as found in next-generation nanolithography machines.

AB - The propulsion of a liquid indium-tin microdroplet by nanosecond-pulse laser impact is experimentally investigated. We capture the physics of the droplet propulsion in a scaling law that accurately describes the plasma-imparted momentum transfer over nearly three decades of pulse energy, enabling the optimization of the laser-droplet coupling. The subsequent deformation of the droplet is described by an analytical model that accounts for the droplet’s propulsion velocity and the liquid properties. Comparing our findings to those from vaporization-accelerated millimeter-sized water droplets, we demonstrate that the fluid-dynamic response of laser-impacted droplets is scalable and decoupled from the propulsion mechanism. By contrast, the physics behind the propulsion of liquid-metal droplets differs from that of water. It is studied here in detail and under industrially relevant conditions as found in next-generation nanolithography machines.

KW - METIS-317371

KW - IR-101179

U2 - 10.1103/PhysRevApplied.6.014018

DO - 10.1103/PhysRevApplied.6.014018

M3 - Article

VL - 6

SP - 014018-

JO - Physical review applied

JF - Physical review applied

SN - 2331-7019

IS - 1

M1 - 014018

ER -

Kurilovich D, Klein AL, Torretti F, Lassise A, Hoekstra R, Ubachs W et al. Plasma Propulsion of a Metallic Microdroplet and its Deformation upon Laser Impact. Physical review applied. 2016;6(1):014018-. 014018. https://doi.org/10.1103/PhysRevApplied.6.014018