@article{e0133bc9ad0f4fef9eca922438298616,
title = "Plasmonic interconnects for global wires in integrated circuits",
abstract = "Surface plasmon polaritons (SPPs) are bound electromagnetic waves propagating at a dielectric-metal interface, which have gained attention for high performance and ability for miniaturisation in high-speed dense circuits, due to their subwavelength properties. A dielectric-metal-dielectric (I-M-I) plasmonic waveguide with a 40 nm thick metal or metal-like strip on silicon substrate is proposed for intra-chip communication. The propagation characteristics of the I-M-I waveguide are investigated by numerical simulation and the modes are experimentally verified by scanning near-field optical microscopy. Metal lines as thin as 40 nm can have propagation lengths as large as 239 µm, which has small footprint compatible with the advanced interconnect process.",
keywords = "Insulator-metal-insulator plasmonic waveguide, Intra-chip communication, Long-range surface plasmon polaritons, LR-SPP, Near-field signal, Plasmonic interconnect, NLA",
author = "Chua, {Soo Jin} and Yan Liu and Lu Ding and Aaron Thean and Ting Mei and Nijhuis, {Christian A.}",
note = "Funding Information: Christian A. Nijhuis received his Master{\textquoteright}s degree in Chemistry from the University of Groningen in 2002, and PhD degree from the University of Twente in 2006 (Cum Laude; top 5%). Under the direction of Professor David N. Reinhoudt, his Doctoral thesis included studies on the surface chemistry of supramolecular assemblies and their use in bottom-up nano-fabrication. He received the Simon Stevin Research award from the Netherlands Organization for Scientific Research (NWO) in 2006 to conduct overseas research. In the group of Professor George M. Whitesides, as a Postdoctoral research fellow, he developed a platform for measurements of charge transport across layers that are one molecule thick. In 2010, he received the NRF research fellowship and he joined the Department of Chemistry at the National University of Singapore as an Assistant Professor and promoted to Associate Professor in 2016. In 2012, he received the NRF CRP grant to start a new program to develop plasmonic-electronic devices which entered phase II in 2017. He currently uses bottom-up nanofabrication techniques to construct self-assembled nano-electronic devices to study light matter interactions and charge transport across molecular junctions. Other interests include synchrotron based surface characterisation, self-assembly, synthesis, 2D materials, and nanoscale dynamics. Funding Information: This research is supported by the National Research Foundation Singapore project on Integration of Electrically Driven Plasmonic Components in High Speed (NRF2016_CRP001_111). We thank Dr. Arseniy from the Institute of Materials Research and Engineering (IMRE, A*STAR) who has kindly consented the use of the s-SNOM for this work. Publisher Copyright: Copyright {\textcopyright} 2020 Inderscience Enterprises Ltd.",
year = "2020",
doi = "10.1504/IJNT.2020.111324",
language = "English",
volume = "17",
pages = "541--549",
journal = "International Journal of Nanotechnology",
issn = "1475-7435",
publisher = "Inderscience Publishers",
number = "7-10",
}