Polydimethylsiloxane as an elastic material applied in capacitive accelerometers

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationSixth Workhop on Micromachining Micromechanics and Mircosystems
    Place of PublicationCopenhagen, Denmark
    Pages68-71
    Publication statusPublished - 3 Sep 1995

    Keywords

    • METIS-113772

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