Polydimethylsiloxane as an elastic material applied in capacitive accelerometers

Joost Conrad Lötters, Wouter Olthuis, Petrus H. Veltink, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationSixth Workhop on Micromachining Micromechanics and Mircosystems
    Place of PublicationCopenhagen, Denmark
    Publication statusPublished - 3 Sept 1995


    • METIS-113772

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