Polydimethylsiloxane as an elastic material applied in capacitive accelerometers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Sixth Workhop on Micromachining Micromechanics and Mircosystems
Place of Publication	Copenhagen, Denmark
Pages	68-71
Publication status	Published - 3 Sept 1995

Keywords

@inproceedings{28d3f43d77dc41649ec12d1c6eee13f6,

title = "Polydimethylsiloxane as an elastic material applied in capacitive accelerometers",

keywords = "METIS-113772",

author = "L{\"o}tters, {Joost Conrad} and Wouter Olthuis and Veltink, {Petrus H.} and Piet Bergveld",

year = "1995",

month = sep,

day = "3",

language = "Undefined",

isbn = "87-89935-00-4",

pages = "68--71",

booktitle = "Sixth Workhop on Micromachining Micromechanics and Mircosystems",

}

Polydimethylsiloxane as an elastic material applied in capacitive accelerometers. / Lötters, Joost Conrad; Olthuis, Wouter; Veltink, Petrus H. et al.
Sixth Workhop on Micromachining Micromechanics and Mircosystems. Copenhagen, Denmark, 1995. p. 68-71.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Polydimethylsiloxane as an elastic material applied in capacitive accelerometers

AU - Lötters, Joost Conrad

AU - Olthuis, Wouter

AU - Veltink, Petrus H.

AU - Bergveld, Piet

PY - 1995/9/3

Y1 - 1995/9/3

KW - METIS-113772

M3 - Conference contribution

SN - 87-89935-00-4

SP - 68

EP - 71

BT - Sixth Workhop on Micromachining Micromechanics and Mircosystems

CY - Copenhagen, Denmark

ER -