Poly(ferrocenyldimethylsilanes) for Reactive Ion Etch Barrier Applications

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Keywords

@article{0ab3ff6f1fc049b5932ebe8fe846c6bd,

title = "Poly(ferrocenyldimethylsilanes) for Reactive Ion Etch Barrier Applications",

keywords = "METIS-250010",

author = "Lammertink, {Rob G.H.} and Hempenius, {Mark A.} and V.Z.H. Chan and E.L. Thomas and Vancso, {Gyula J.}",

year = "2001",

language = "Undefined",

volume = "13",

pages = "429--434",

journal = "Chemistry of materials",

issn = "0897-4756",

publisher = "American Chemical Society",

}