Poly(ferrocenyldimethylsilanes) for Reactive Ion Etch Barrier Applications

Research output: Contribution to journalArticleAcademicpeer-review

105 Citations (Scopus)
Original languageUndefined
Pages (from-to)429-434
JournalChemistry of materials
Volume13
Publication statusPublished - 2001

Keywords

  • METIS-250010

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