Polymer bonding of micro-machined silicon structures

C. den Besten, R.E.G. van Hal, J. Munoz, Piet Bergveld

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Publication statusPublished - 4 Feb 1992
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1992 - Travemünde, Germany
    Duration: 4 Feb 19927 Feb 1992

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1992
    Abbreviated titleMEMS
    CountryGermany
    CityTravemünde
    Period4/02/927/02/92

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