Polymer bonding of micro-machined silicon structures

C. den Besten, R.E.G. van Hal, J. Munoz, Piet Bergveld

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 4 Feb 1992
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1992 - Travemünde, Germany Duration: 4 Feb 1992 → 7 Feb 1992

Workshop	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1992
Abbreviated title	MEMS
Country/Territory	Germany
City	Travemünde
Period	4/02/92 → 7/02/92

Cite this

@conference{842d3bb47ae0406198262390678d7e57,

title = "Polymer bonding of micro-machined silicon structures",

author = "{den Besten}, C. and {van Hal}, R.E.G. and J. Munoz and Piet Bergveld",

year = "1992",

month = feb,

day = "4",

language = "English",

note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1992, MEMS ; Conference date: 04-02-1992 Through 07-02-1992",

}