Polymer bonding of micro-machined silicon structures

C. den Besten, R.E.G. van Hal, J. Munoz, Piet Bergveld

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Publication statusPublished - 4 Feb 1992
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1992 - Travemünde, Germany
    Duration: 4 Feb 19927 Feb 1992

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1992
    Abbreviated titleMEMS
    CountryGermany
    CityTravemünde
    Period4/02/927/02/92

    Cite this

    den Besten, C., van Hal, R. E. G., Munoz, J., & Bergveld, P. (1992). Polymer bonding of micro-machined silicon structures. Poster session presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1992, Travemünde, Germany.