Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator

Y.-A. Chapuis, L. Jalabert, Edin Sarajlic, Rolf Vermeer, D. Collard, H. Fujita

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    In this paper, we present latest results of a thermopneumatic microactuator based on polymer membrane and silicon technology. This device has application in distributed air-jet planar micromanipulation to levitate and convey small objects by changing air-flow direction on the surface. Our technology, combining deformable polymer membrane and movable silicon nozzle fabrication, offers many advantages compared to classic silicon technology, e.g. pneumatic microactuator array device. Those advantages are as follows: low-cost, reliable, simple batch fabrication process, multi-directional (4 directions) air-jet flow, low driving voltage (≤ 5 V), durability under high airpressure,higher transparency for implementing photodetection capabilities, and enabling technology to use flexible and smart materials in MEMS.
    Original languageUndefined
    Title of host publicationProceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    Place of PublicationCancun
    PublisherIEEE Micro Electro Mechanical Systems
    Pages141-144
    Number of pages4
    ISBN (Print)978-1-4244-9633-4
    DOIs
    Publication statusPublished - 23 Jan 2011
    Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
    Duration: 23 Jan 201127 Jan 2011
    Conference number: 24

    Publication series

    Name
    PublisherIEEE Micro Electro Mechanical Systems

    Conference

    Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    Abbreviated titleMEMS
    CountryMexico
    CityCancun
    Period23/01/1127/01/11

    Keywords

    • METIS-277543
    • IR-75988
    • EWI-19615

    Cite this

    Chapuis, Y-A., Jalabert, L., Sarajlic, E., Vermeer, R., Collard, D., & Fujita, H. (2011). Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator. In Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 141-144). Cancun: IEEE Micro Electro Mechanical Systems. https://doi.org/10.1109/MEMSYS.2011.5734381