Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator

Y.-A. Chapuis; L. Jalabert; Edin Sarajlic; Rolf Vermeer; D. Collard; H. Fujita

doi:10.1109/MEMSYS.2011.5734381

Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator

Y.-A. Chapuis, L. Jalabert, Edin Sarajlic, Rolf Vermeer, D. Collard, H. Fujita

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this paper, we present latest results of a thermopneumatic microactuator based on polymer membrane and silicon technology. This device has application in distributed air-jet planar micromanipulation to levitate and convey small objects by changing air-flow direction on the surface. Our technology, combining deformable polymer membrane and movable silicon nozzle fabrication, offers many advantages compared to classic silicon technology, e.g. pneumatic microactuator array device. Those advantages are as follows: low-cost, reliable, simple batch fabrication process, multi-directional (4 directions) air-jet flow, low driving voltage (≤ 5 V), durability under high airpressure,higher transparency for implementing photodetection capabilities, and enabling technology to use flexible and smart materials in MEMS.

Original language	Undefined
Title of host publication	Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Place of Publication	Cancun
Publisher	IEEE
Pages	141-144
Number of pages	4
ISBN (Print)	978-1-4244-9633-4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734381
Publication status	Published - 23 Jan 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24

Publication series

Name
Publisher	IEEE Micro Electro Mechanical Systems

Conference

Conference	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Abbreviated title	MEMS
Country/Territory	Mexico
City	Cancun
Period	23/01/11 → 27/01/11

Keywords

METIS-277543
IR-75988
EWI-19615

Access to Document

10.1109/MEMSYS.2011.5734381

http://eprints.eemcs.utwente.nl/secure2/19615/01/Polymer_membrane_-_Rolf_Vermeer_-_mems_2011.pdf

Cite this

@inproceedings{21766dae08444aa1b59aaccbffa5870d,

title = "Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator",

abstract = "In this paper, we present latest results of a thermopneumatic microactuator based on polymer membrane and silicon technology. This device has application in distributed air-jet planar micromanipulation to levitate and convey small objects by changing air-flow direction on the surface. Our technology, combining deformable polymer membrane and movable silicon nozzle fabrication, offers many advantages compared to classic silicon technology, e.g. pneumatic microactuator array device. Those advantages are as follows: low-cost, reliable, simple batch fabrication process, multi-directional (4 directions) air-jet flow, low driving voltage (≤ 5 V), durability under high airpressure,higher transparency for implementing photodetection capabilities, and enabling technology to use flexible and smart materials in MEMS.",

keywords = "METIS-277543, IR-75988, EWI-19615",

author = "Y.-A. Chapuis and L. Jalabert and Edin Sarajlic and Rolf Vermeer and D. Collard and H. Fujita",

note = "10.1109/MEMSYS.2011.5734381 ; 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

year = "2011",

month = jan,

day = "23",

doi = "10.1109/MEMSYS.2011.5734381",

language = "Undefined",

isbn = "978-1-4244-9633-4",

publisher = "IEEE",

pages = "141--144",

booktitle = "Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011",

address = "United States",

}

Chapuis, Y-A, Jalabert, L, Sarajlic, E, Vermeer, R, Collard, D & Fujita, H 2011, Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator. in Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. IEEE, Cancun, pp. 141-144, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734381

Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator. / Chapuis, Y.-A.; Jalabert, L.; Sarajlic, Edin et al.
Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. Cancun: IEEE, 2011. p. 141-144.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Jalabert, L.

AU - Sarajlic, Edin

AU - Vermeer, Rolf

AU - Collard, D.

AU - Fujita, H.

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N2 - In this paper, we present latest results of a thermopneumatic microactuator based on polymer membrane and silicon technology. This device has application in distributed air-jet planar micromanipulation to levitate and convey small objects by changing air-flow direction on the surface. Our technology, combining deformable polymer membrane and movable silicon nozzle fabrication, offers many advantages compared to classic silicon technology, e.g. pneumatic microactuator array device. Those advantages are as follows: low-cost, reliable, simple batch fabrication process, multi-directional (4 directions) air-jet flow, low driving voltage (≤ 5 V), durability under high airpressure,higher transparency for implementing photodetection capabilities, and enabling technology to use flexible and smart materials in MEMS.

AB - In this paper, we present latest results of a thermopneumatic microactuator based on polymer membrane and silicon technology. This device has application in distributed air-jet planar micromanipulation to levitate and convey small objects by changing air-flow direction on the surface. Our technology, combining deformable polymer membrane and movable silicon nozzle fabrication, offers many advantages compared to classic silicon technology, e.g. pneumatic microactuator array device. Those advantages are as follows: low-cost, reliable, simple batch fabrication process, multi-directional (4 directions) air-jet flow, low driving voltage (≤ 5 V), durability under high airpressure,higher transparency for implementing photodetection capabilities, and enabling technology to use flexible and smart materials in MEMS.

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