Abstract
We propose a novel technique for microlens fabrication which is compatible with silicon oxynitride technology, and enables the collimation of light exiting the waveguides into beams with divergence angles of ~0.52°.
Original language | English |
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Title of host publication | 16th European Conference on Integrated Optics, ECIO 2012 |
Place of Publication | Castelldefels/Barcelona |
Publisher | Insitut de Ciències Fotòniques |
Number of pages | 2 |
Publication status | Published - Apr 2012 |
Event | 16th European Conference on Integrated Optics, ECIO 2012 - Sitges-Barcelona, Spain Duration: 18 Apr 2012 → 20 Apr 2012 Conference number: 16 |
Conference
Conference | 16th European Conference on Integrated Optics, ECIO 2012 |
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Abbreviated title | ECIO |
Country/Territory | Spain |
City | Sitges-Barcelona |
Period | 18/04/12 → 20/04/12 |
Keywords
- Arrayed microlenses
- IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
- Integrated Optics
- Waveguides