Polymer microlenses for collimating light from single-mode silicon oxynitride optical waveguides

N. Ismail, Lantian Chang, G. Sengo, R.M. de Ridder, Markus Pollnau, Kerstin Worhoff

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    Abstract

    We propose a novel technique for microlens fabrication which is compatible with silicon oxynitride technology, and enables the collimation of light exiting the waveguides into beams with divergence angles of ~0.52°.
    Original languageEnglish
    Title of host publication16th European Conference on Integrated Optics, ECIO 2012
    Place of PublicationCastelldefels/Barcelona
    PublisherInsitut de Ciències Fotòniques
    Number of pages2
    Publication statusPublished - Apr 2012
    Event16th European Conference on Integrated Optics, ECIO 2012 - Sitges-Barcelona, Spain
    Duration: 18 Apr 201220 Apr 2012
    Conference number: 16

    Conference

    Conference16th European Conference on Integrated Optics, ECIO 2012
    Abbreviated titleECIO
    CountrySpain
    CitySitges-Barcelona
    Period18/04/1220/04/12

    Keywords

    • Arrayed microlenses
    • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
    • Integrated Optics
    • Waveguides

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  • Cite this

    Ismail, N., Chang, L., Sengo, G., de Ridder, R. M., Pollnau, M., & Worhoff, K. (2012). Polymer microlenses for collimating light from single-mode silicon oxynitride optical waveguides. In 16th European Conference on Integrated Optics, ECIO 2012 [Paper 188] Castelldefels/Barcelona: Insitut de Ciències Fotòniques.