Polymer microlenses for collimating light from single-mode silicon oxynitride optical waveguides

N. Ismail, Lantian Chang, G. Sengo, R.M. de Ridder, Markus Pollnau, Kerstin Worhoff

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    23 Downloads (Pure)

    Abstract

    We propose a novel technique for microlens fabrication which is compatible with silicon oxynitride technology, and enables the collimation of light exiting the waveguides into beams with divergence angles of ~0.52°.
    Original languageEnglish
    Title of host publication16th European Conference on Integrated Optics, ECIO 2012
    Place of PublicationCastelldefels/Barcelona
    PublisherInsitut de Ciències Fotòniques
    Number of pages2
    Publication statusPublished - Apr 2012
    Event16th European Conference on Integrated Optics, ECIO 2012 - Sitges-Barcelona, Spain
    Duration: 18 Apr 201220 Apr 2012
    Conference number: 16

    Conference

    Conference16th European Conference on Integrated Optics, ECIO 2012
    Abbreviated titleECIO
    CountrySpain
    CitySitges-Barcelona
    Period18/04/1220/04/12

    Keywords

    • Arrayed microlenses
    • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
    • Integrated Optics
    • Waveguides

    Fingerprint Dive into the research topics of 'Polymer microlenses for collimating light from single-mode silicon oxynitride optical waveguides'. Together they form a unique fingerprint.

    Cite this