Abstract
We propose a novel technique for microlens fabrication which is compatible with silicon oxynitride technology, and enables the collimation of light exiting the waveguides into beams with divergence angles of ~0.52°.
| Original language | English |
|---|---|
| Title of host publication | 16th European Conference on Integrated Optics, ECIO 2012 |
| Place of Publication | Castelldefels/Barcelona |
| Publisher | Insitut de Ciències Fotòniques |
| Number of pages | 2 |
| Publication status | Published - Apr 2012 |
| Event | 16th European Conference on Integrated Optics, ECIO 2012 - Sitges-Barcelona, Spain Duration: 18 Apr 2012 → 20 Apr 2012 Conference number: 16 |
Conference
| Conference | 16th European Conference on Integrated Optics, ECIO 2012 |
|---|---|
| Abbreviated title | ECIO |
| Country/Territory | Spain |
| City | Sitges-Barcelona |
| Period | 18/04/12 → 20/04/12 |
Keywords
- Arrayed microlenses
- IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
- Integrated Optics
- Waveguides
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