Polymers in conventional and alternative lithography for the fabrication of nanostructures

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Abstract

This review provides a survey of lithography techniques and the resist materials employed with these techniques. The first part focuses on the conventional lithography methods used to fabricate complex micro- and nano-structured surfaces. In the second part, emphasis is placed on patterning with unconventional lithography techniques such as printing, molding, and embossing, and on their development into viable, high-resolution patterning technologies.
Original languageEnglish
Pages (from-to)2033-2052
Number of pages20
JournalEuropean polymer journal
Volume47
Issue number11
DOIs
Publication statusPublished - 2011

Keywords

  • METIS-282325
  • IR-104360

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