Porous silicon bulk micromachining for thermally isolated mambrane formation

Cs. Ducso, E. Vazsonyi, M. Adam, I. Barsony, I. Barsony, Johannes G.E. Gardeniers, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of Eursensors X
Place of PublicationLeuven
Pages227-230
Publication statusPublished - 8 Sep 1996
Event10th European Conference on Solid-State Transducers, Eurosensors X - Leuven, Belgium
Duration: 8 Sep 199611 Sep 1996
Conference number: 10

Conference

Conference10th European Conference on Solid-State Transducers, Eurosensors X
Abbreviated titleEurosensors
CountryBelgium
CityLeuven
Period8/09/9611/09/96

Keywords

  • METIS-112894
  • IR-16012

Cite this

Ducso, C., Vazsonyi, E., Adam, M., Barsony, I., Barsony, I., Gardeniers, J. G. E., & van den Berg, A. (1996). Porous silicon bulk micromachining for thermally isolated mambrane formation. In Proceedings of Eursensors X (pp. 227-230). Leuven.