Porous silicon bulk micromachining for thermally isolated mambrane formation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of Eursensors X
Place of Publication	Leuven
Pages	227-230
Publication status	Published - 8 Sept 1996
Event	10th European Conference on Solid-State Transducers, Eurosensors X - Leuven, Belgium Duration: 8 Sept 1996 → 11 Sept 1996 Conference number: 10

Conference	10th European Conference on Solid-State Transducers, Eurosensors X
Abbreviated title	Eurosensors
Country/Territory	Belgium
City	Leuven
Period	8/09/96 → 11/09/96

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@inproceedings{0eb7b6b67656462683222472d450cf26,

title = "Porous silicon bulk micromachining for thermally isolated mambrane formation",

keywords = "METIS-112894, IR-16012",

author = "Cs. Ducso and E. Vazsonyi and M. Adam and I. Barsony and I. Barsony and Gardeniers, \{Johannes G.E.\} and \{van den Berg\}, Albert",

year = "1996",

month = sep,

day = "8",

language = "Undefined",

pages = "227--230",

booktitle = "Proceedings of Eursensors X",

note = "10th European Conference on Solid-State Transducers, Eurosensors X ; Conference date: 08-09-1996 Through 11-09-1996",

}

TY - GEN

T1 - Porous silicon bulk micromachining for thermally isolated mambrane formation

AU - Ducso, Cs.

AU - Vazsonyi, E.

AU - Adam, M.

AU - Barsony, I.

AU - Gardeniers, Johannes G.E.

AU - van den Berg, Albert

N1 - Conference code: 10

PY - 1996/9/8

Y1 - 1996/9/8

KW - METIS-112894

KW - IR-16012

M3 - Conference contribution

SP - 227

EP - 230

BT - Proceedings of Eursensors X

CY - Leuven

T2 - 10th European Conference on Solid-State Transducers, Eurosensors X

Y2 - 8 September 1996 through 11 September 1996

ER -