Porous silicon bulk micromachining for thermally isolated membrane formation

Cs. Ducso, E. Vazsonyi, M. Adam, I. Szabo, I. Barsony, I. Barsony, Johannes G.E. Gardeniers, Albert van den Berg

Research output: Contribution to journal › Article › Academic › peer-review

65 Citations (Scopus)
290 Downloads (Pure)

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