@inproceedings{41d3829ee3034da2bad4aad1b009e192,
title = "Position control of a MEMS stage with integrated sensor",
keywords = "IR-79999, METIS-277155",
author = "B. Krijnen and B. Krijnen and Brouwer, {Dannis Michel}",
year = "2011",
month = may,
day = "23",
language = "Undefined",
isbn = "978-0-9553082-9-1",
publisher = "EUSPEN",
pages = "105--108",
editor = "H. Spaan and P Shore",
booktitle = "Proceedings of the 11th EUSPEN international conference",
note = "null ; Conference date: 23-05-2011 Through 26-05-2011",
}