Position control of a MEMS stage with integrated sensor

B. Krijnen, B. Krijnen, Dannis Michel Brouwer

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Citations (Scopus)
16 Downloads (Pure)
Original languageUndefined
Title of host publicationProceedings of the 11th EUSPEN international conference
EditorsH. Spaan, P Shore
Place of PublicationLake Como, Italy
PublisherEUSPEN
Pages105-108
ISBN (Print)978-0-9553082-9-1
Publication statusPublished - 23 May 2011
Event11th EUSPEN International Conference 2011 - Spazio Villa Erba Congress Centre, Lake Como, Italy
Duration: 23 May 201126 May 2011
Conference number: 11

Publication series

Name
PublisherEUSPEN

Conference

Conference11th EUSPEN International Conference 2011
Abbreviated titleEUSPEN
CountryItaly
CityLake Como
Period23/05/1126/05/11

Keywords

  • IR-79999
  • METIS-277155

Cite this

Krijnen, B., Krijnen, B., & Brouwer, D. M. (2011). Position control of a MEMS stage with integrated sensor. In H. Spaan, & P. Shore (Eds.), Proceedings of the 11th EUSPEN international conference (pp. 105-108). Lake Como, Italy: EUSPEN.