Position control of a MEMS stage with integrated sensor

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Original language	English
Title of host publication	Proceedings of the 11th EUSPEN international conference
Editors	H. Spaan, P Shore
Place of Publication	Lake Como, Italy
Publisher	EUSPEN
Pages	105-108
ISBN (Print)	978-0-9553082-9-1
Publication status	Published - 23 May 2011
Event	11th EUSPEN International Conference 2011 - Spazio Villa Erba Congress Centre, Lake Como, Italy Duration: 23 May 2011 → 26 May 2011 Conference number: 11

Conference	11th EUSPEN International Conference 2011
Abbreviated title	EUSPEN
Country/Territory	Italy
City	Lake Como
Period	23/05/11 → 26/05/11

Access to Document

@inproceedings{41d3829ee3034da2bad4aad1b009e192,

title = "Position control of a MEMS stage with integrated sensor",

author = "Bram Krijnen and Brouwer, {Dannis M.}",

year = "2011",

month = may,

day = "23",

language = "English",

isbn = "978-0-9553082-9-1",

pages = "105--108",

editor = "H. Spaan and P Shore",

booktitle = "Proceedings of the 11th EUSPEN international conference",

publisher = "EUSPEN",

note = "11th EUSPEN International Conference 2011, EUSPEN ; Conference date: 23-05-2011 Through 26-05-2011",

}

TY - GEN

T1 - Position control of a MEMS stage with integrated sensor

AU - Krijnen, Bram

AU - Brouwer, Dannis M.

N1 - Conference code: 11

PY - 2011/5/23

Y1 - 2011/5/23

M3 - Conference contribution

SN - 978-0-9553082-9-1

SP - 105

EP - 108

BT - Proceedings of the 11th EUSPEN international conference

A2 - Spaan, H.

A2 - Shore, P

PB - EUSPEN

CY - Lake Como, Italy

T2 - 11th EUSPEN International Conference 2011

Y2 - 23 May 2011 through 26 May 2011

ER -