Position control of a MEMS stage with integrated sensor

Bram Krijnen, Dannis M. Brouwer

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Citations (Scopus)
74 Downloads (Pure)
Original languageEnglish
Title of host publicationProceedings of the 11th EUSPEN international conference
EditorsH. Spaan, P Shore
Place of PublicationLake Como, Italy
PublisherEUSPEN
Pages105-108
ISBN (Print)978-0-9553082-9-1
Publication statusPublished - 23 May 2011
Event11th EUSPEN International Conference 2011 - Spazio Villa Erba Congress Centre, Lake Como, Italy
Duration: 23 May 201126 May 2011
Conference number: 11

Conference

Conference11th EUSPEN International Conference 2011
Abbreviated titleEUSPEN
Country/TerritoryItaly
CityLake Como
Period23/05/1126/05/11

Cite this