Potential of LIGA for the facbrication of 3D multi electrode arrays

J.A. Bielen, T.A. Frieswijk, Wim Rutten

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationEnschede
Publication statusPublished - 11 Jun 1997

Keywords

  • METIS-115018

Cite this

Bielen, J. A., Frieswijk, T. A., & Rutten, W. (1997, Jun 11). Potential of LIGA for the facbrication of 3D multi electrode arrays. Enschede.
Bielen, J.A. ; Frieswijk, T.A. ; Rutten, Wim. / Potential of LIGA for the facbrication of 3D multi electrode arrays. 1997. Enschede.
@misc{9f186cdc9ae6438fb4fb5bdae7c5ed47,
title = "Potential of LIGA for the facbrication of 3D multi electrode arrays",
keywords = "METIS-115018",
author = "J.A. Bielen and T.A. Frieswijk and Wim Rutten",
year = "1997",
month = "6",
day = "11",
language = "Undefined",
type = "Other",

}

Bielen, JA, Frieswijk, TA & Rutten, W 1997, Potential of LIGA for the facbrication of 3D multi electrode arrays. Enschede.

Potential of LIGA for the facbrication of 3D multi electrode arrays. / Bielen, J.A.; Frieswijk, T.A.; Rutten, Wim.

Enschede. 1997, .

Research output: Other contributionOther research output

TY - GEN

T1 - Potential of LIGA for the facbrication of 3D multi electrode arrays

AU - Bielen, J.A.

AU - Frieswijk, T.A.

AU - Rutten, Wim

PY - 1997/6/11

Y1 - 1997/6/11

KW - METIS-115018

M3 - Other contribution

CY - Enschede

ER -