Potential of LIGA for the facbrication of 3D multi electrode arrays

J.A. Bielen, T.A. Frieswijk, Wim Rutten

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 11 Jun 1997

    Keywords

    • METIS-115018

    Cite this

    Bielen, J. A., Frieswijk, T. A., & Rutten, W. (1997, Jun 11). Potential of LIGA for the facbrication of 3D multi electrode arrays. Enschede.