Potential of LIGA for the facbrication of 3D multi electrode arrays

J.A. Bielen, T.A. Frieswijk, Wim Rutten

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 11 Jun 1997

    Keywords

    • METIS-115018

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