Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of MicroMechanics Europe (MME) 2000 Conference
Place of Publication	Uppsala, Sweden
Pages	-
Number of pages	3
Publication status	Published - 5 Oct 2000
Event	11th MicroMechanics Europe Workshop, MME 2000 - Uppsala, Sweden Duration: 1 Oct 2000 → 3 Oct 2000 Conference number: 11

Conference	11th MicroMechanics Europe Workshop, MME 2000
Abbreviated title	MME
Country/Territory	Sweden
City	Uppsala
Period	1/10/00 → 3/10/00

Keywords

@inproceedings{e873316da7ad402981fa22f752f6edba,

title = "Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors",

keywords = "METIS-113072, IR-16187",

author = "Stefan Schlautmann and H. Wensink and Schasfoort, {Richardus B.M.} and Elwenspoek, {Michael Curt} and {van den Berg}, Albert",

year = "2000",

month = oct,

day = "5",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of MicroMechanics Europe (MME) 2000 Conference",

note = "11th MicroMechanics Europe Workshop, MME 2000 ; Conference date: 01-10-2000 Through 03-10-2000",

}

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors

AU - Schlautmann, Stefan

AU - Wensink, H.

AU - Schasfoort, Richardus B.M.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

N1 - Conference code: 11

PY - 2000/10/5

Y1 - 2000/10/5

KW - METIS-113072

KW - IR-16187

M3 - Conference contribution

SP - -

BT - Proceedings of MicroMechanics Europe (MME) 2000 Conference

CY - Uppsala, Sweden

T2 - 11th MicroMechanics Europe Workshop, MME 2000

Y2 - 1 October 2000 through 3 October 2000

ER -