Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of MicroMechanics Europe (MME) 2000 Conference
Place of PublicationUppsala, Sweden
Pages-
Number of pages3
Publication statusPublished - 5 Oct 2000
Event11th MicroMechanics Europe Workshop, MME 2000 - Uppsala, Sweden
Duration: 1 Oct 20003 Oct 2000
Conference number: 11

Conference

Conference11th MicroMechanics Europe Workshop, MME 2000
Abbreviated titleMME
CountrySweden
CityUppsala
Period1/10/003/10/00

Keywords

  • METIS-113072
  • IR-16187

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