Powerful electrothermal actuators developed for micro tribosensors

S. Deladi, G.J.M. Krijnen, M.C. Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 12 Mar 2003
Event	5th Sensor Technology Workshop Sense of Contact 2003 - International Conference Centre, Wageningen, Netherlands Duration: 12 Mar 2003 → 12 Mar 2003 Conference number: 5

Workshop	5th Sensor Technology Workshop Sense of Contact 2003
Abbreviated title	Sense of Contact V
Country/Territory	Netherlands
City	Wageningen
Period	12/03/03 → 12/03/03

Cite this

@conference{0efb000e1d2a4b62bfa526b9f5173d26,

title = "Powerful electrothermal actuators developed for micro tribosensors",

author = "S. Deladi and G.J.M. Krijnen and M.C. Elwenspoek",

year = "2003",

month = mar,

day = "12",

language = "English",

note = "5th Sensor Technology Workshop Sense of Contact 2003, Sense of Contact V ; Conference date: 12-03-2003 Through 12-03-2003",

}