Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

Najmeh Abbasirad; Qais Saadeh; Richard Ciesielski; Alexander Gottwald; Vicky Philippsen; Igor Makhotkin; Andrey Sokolov; Michael Kolbe; Frank Scholze; Victor Soltwisch

doi:10.1117/12.2659369

Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

Najmeh Abbasirad^*, Qais Saadeh, Richard Ciesielski, Alexander Gottwald, Vicky Philippsen, Igor Makhotkin, Andrey Sokolov, Michael Kolbe, Frank Scholze, Victor Soltwisch

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Optical constants of materials are essential for predicting and interpreting optical responses, which is crucial when designing new optical components. Although accurate databases of optical constants are available for some regions of the electromagnetic spectrum, for the vacuum ultraviolet (VUV), the extreme ultraviolet (EUV), and soft X-ray spectral ranges, the available optical data suffer inconsistencies, and their determination is particularly challenging. Here, we present a selected example of ruthenium (Ru) for the determination of optical constants from the VUV to the soft X-ray spectral range using reflectivity measurements performed with synchrotron radiation. The subtleties of reflectivity measurements are discussed for a large wavelength range, from 0.7 to 200 nanometers.

Original language	English
Title of host publication	Metrology, Inspection, and Process Control XXXVII
Editors	John C. Robinson, Matthew J. Sendelbach
Publisher	SPIE
ISBN (Electronic)	9781510660991
DOIs	https://doi.org/10.1117/12.2659369
Publication status	Published - 27 Apr 2023
Event	Metrology, Inspection, and Process Control XXXVII 2023 - San Jose, United States Duration: 27 Feb 2023 → 2 Mar 2023 Conference number: 37

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	12496
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Metrology, Inspection, and Process Control XXXVII 2023
Country/Territory	United States
City	San Jose
Period	27/02/23 → 2/03/23

Keywords

extreme ultraviolet
optical constant
soft X-ray
synchrotron radiation
vacuum ultraviolet
X-ray reflectometry
2023 OA procedure

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10.1117/12.2659369

124963BFinal published version, 969 KBLicence: Taverne

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Abbasirad, N., Saadeh, Q., Ciesielski, R., Gottwald, A., Philippsen, V., Makhotkin, I., Sokolov, A., Kolbe, M., Scholze, F., & Soltwisch, V. (2023). Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range. In J. C. Robinson, & M. J. Sendelbach (Eds.), Metrology, Inspection, and Process Control XXXVII Article 124963B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12496). SPIE. https://doi.org/10.1117/12.2659369

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title = "Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range",

abstract = "Optical constants of materials are essential for predicting and interpreting optical responses, which is crucial when designing new optical components. Although accurate databases of optical constants are available for some regions of the electromagnetic spectrum, for the vacuum ultraviolet (VUV), the extreme ultraviolet (EUV), and soft X-ray spectral ranges, the available optical data suffer inconsistencies, and their determination is particularly challenging. Here, we present a selected example of ruthenium (Ru) for the determination of optical constants from the VUV to the soft X-ray spectral range using reflectivity measurements performed with synchrotron radiation. The subtleties of reflectivity measurements are discussed for a large wavelength range, from 0.7 to 200 nanometers.",

keywords = "extreme ultraviolet, optical constant, soft X-ray, synchrotron radiation, vacuum ultraviolet, X-ray reflectometry, 2023 OA procedure",

author = "Najmeh Abbasirad and Qais Saadeh and Richard Ciesielski and Alexander Gottwald and Vicky Philippsen and Igor Makhotkin and Andrey Sokolov and Michael Kolbe and Frank Scholze and Victor Soltwisch",

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Abbasirad, N, Saadeh, Q, Ciesielski, R, Gottwald, A, Philippsen, V, Makhotkin, I, Sokolov, A, Kolbe, M, Scholze, F & Soltwisch, V 2023, Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range. in JC Robinson & MJ Sendelbach (eds), Metrology, Inspection, and Process Control XXXVII., 124963B, Proceedings of SPIE - The International Society for Optical Engineering, vol. 12496, SPIE, Metrology, Inspection, and Process Control XXXVII 2023, San Jose, United States, 27/02/23. https://doi.org/10.1117/12.2659369

Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range. / Abbasirad, Najmeh; Saadeh, Qais; Ciesielski, Richard et al.
Metrology, Inspection, and Process Control XXXVII. ed. / John C. Robinson; Matthew J. Sendelbach. SPIE, 2023. 124963B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12496).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

AU - Abbasirad, Najmeh

AU - Saadeh, Qais

AU - Ciesielski, Richard

AU - Gottwald, Alexander

AU - Philippsen, Vicky

AU - Makhotkin, Igor

AU - Sokolov, Andrey

AU - Kolbe, Michael

AU - Scholze, Frank

AU - Soltwisch, Victor

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N2 - Optical constants of materials are essential for predicting and interpreting optical responses, which is crucial when designing new optical components. Although accurate databases of optical constants are available for some regions of the electromagnetic spectrum, for the vacuum ultraviolet (VUV), the extreme ultraviolet (EUV), and soft X-ray spectral ranges, the available optical data suffer inconsistencies, and their determination is particularly challenging. Here, we present a selected example of ruthenium (Ru) for the determination of optical constants from the VUV to the soft X-ray spectral range using reflectivity measurements performed with synchrotron radiation. The subtleties of reflectivity measurements are discussed for a large wavelength range, from 0.7 to 200 nanometers.

AB - Optical constants of materials are essential for predicting and interpreting optical responses, which is crucial when designing new optical components. Although accurate databases of optical constants are available for some regions of the electromagnetic spectrum, for the vacuum ultraviolet (VUV), the extreme ultraviolet (EUV), and soft X-ray spectral ranges, the available optical data suffer inconsistencies, and their determination is particularly challenging. Here, we present a selected example of ruthenium (Ru) for the determination of optical constants from the VUV to the soft X-ray spectral range using reflectivity measurements performed with synchrotron radiation. The subtleties of reflectivity measurements are discussed for a large wavelength range, from 0.7 to 200 nanometers.

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KW - soft X-ray

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KW - vacuum ultraviolet

KW - X-ray reflectometry

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ER -

Abbasirad N, Saadeh Q, Ciesielski R, Gottwald A, Philippsen V, Makhotkin I et al. Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range. In Robinson JC, Sendelbach MJ, editors, Metrology, Inspection, and Process Control XXXVII. SPIE. 2023. 124963B. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2659369

Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

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