Active damping can be realised robustly through the use of a position actuator, a collocated force sensor, and control based on ‘Integral Force Feedback’ (IFF). Instead of a pure integrator, it is also possible to use a first-order lowpass-filter in the feedback loop (‘leaking IFF’). For both cases, the maximum achievable relative damping for a certain vibration mode can easily be predicted. If the achievable damping is too low, it is possible to improve this by means of ‘crosstalk-compensation’. A close look at these strategies reveals that there is a one-to-one relation between ‘leaking IFF’ and ‘crosstalk-compensation’. The presented theory is verified by means of active damping experiments within the lens support of a wafer stepper.
|Title of host publication||Proceedings of the Tenth International Congress on Sound and Vibration, ICSV 2003|
|Subtitle of host publication||7-10 July 2003, Stockholm, Sweden|
|Publisher||International Institute of Acoustics and Vibration (IIAV)|
|Number of pages||7|
|Publication status||Published - 7 Jul 2003|
|Event||10th International Congress on Sound and Vibration, ICSV 2003 - Stockholm, Sweden|
Duration: 7 Jul 2003 → 10 Jul 2003
Conference number: 10
|Conference||10th International Congress on Sound and Vibration, ICSV 2003|
|Period||7/07/03 → 10/07/03|
Holterman, J., & de Vries, T. J. A. (2003). Prediction and Improvement of the Maximum Achievable Damping with Collocated Control. In Proceedings of the Tenth International Congress on Sound and Vibration, ICSV 2003: 7-10 July 2003, Stockholm, Sweden (pp. 283-290). International Institute of Acoustics and Vibration (IIAV).