Prediction and Improvement of the Maximum Achievable Damping with Collocated Control

Jan Holterman, Theo J.A. de Vries

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    1 Citation (Scopus)
    22 Downloads (Pure)

    Abstract

    Active damping can be realised robustly through the use of a position actuator, a collocated force sensor, and control based on ‘Integral Force Feedback’ (IFF). Instead of a pure integrator, it is also possible to use a first-order lowpass-filter in the feedback loop (‘leaking IFF’). For both cases, the maximum achievable relative damping for a certain vibration mode can easily be predicted. If the achievable damping is too low, it is possible to improve this by means of ‘crosstalk-compensation’. A close look at these strategies reveals that there is a one-to-one relation between ‘leaking IFF’ and ‘crosstalk-compensation’. The presented theory is verified by means of active damping experiments within the lens support of a wafer stepper.
    Original languageEnglish
    Title of host publicationProceedings of the Tenth International Congress on Sound and Vibration, ICSV 2003
    Subtitle of host publication7-10 July 2003, Stockholm, Sweden
    PublisherInternational Institute of Acoustics and Vibration (IIAV)
    Pages283-290
    Number of pages7
    Publication statusPublished - 7 Jul 2003
    Event10th International Congress on Sound and Vibration, ICSV 2003 - Stockholm, Sweden
    Duration: 7 Jul 200310 Jul 2003
    Conference number: 10

    Conference

    Conference10th International Congress on Sound and Vibration, ICSV 2003
    Abbreviated titleICSV
    CountrySweden
    CityStockholm
    Period7/07/0310/07/03

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  • Cite this

    Holterman, J., & de Vries, T. J. A. (2003). Prediction and Improvement of the Maximum Achievable Damping with Collocated Control. In Proceedings of the Tenth International Congress on Sound and Vibration, ICSV 2003: 7-10 July 2003, Stockholm, Sweden (pp. 283-290). International Institute of Acoustics and Vibration (IIAV).