Preferred orientation and piezoelectricity in sputtered ZnO films

Johannes G.E. Gardeniers, Z.M. Rittersma, G.J. Burger

    Research output: Contribution to journalArticleAcademicpeer-review

    182 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)7844-7854
    JournalJournal of Applied Physics
    Volume83
    Issue number12
    Publication statusPublished - 1998

    Keywords

    • METIS-111516

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