Preferred orientation and piezoelectricity in sputtered ZnO films

Johannes G.E. Gardeniers, Z.M. Rittersma, G.J. Burger

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{418585bf27d54e62a0107ce9fb65fdda,

title = "Preferred orientation and piezoelectricity in sputtered ZnO films",

keywords = "METIS-111516",

author = "Gardeniers, {Johannes G.E.} and Z.M. Rittersma and G.J. Burger",

year = "1998",

language = "Undefined",

volume = "83",

pages = "7844--7854",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "12",

}